Electrical and Computer Engineering Department, University of Missouri Columbia, Columbia, MO, USA.
Sci Rep. 2023 Mar 1;13(1):3470. doi: 10.1038/s41598-023-30328-1.
We have investigated an uncooled infrared (IR) detector utilizing a dual level architecture. This was achieved by combining two-microbolometer stack in the vertical direction to achieve high IR absorption over two distinct spectral windows across the long wavelength infrared region (LWIR). In addition, we have studied amorphous silicon germanium oxide (SiGeO) as an IR sensitive material, and metasurface to control IR absorption/reflection in interaction with standard Fabry-Perot cavity. The bottom microbolometer uses a metasurface to selectively absorbs a portion of the spectrum and reflects radiation outside this window range. At the same time, the top microbolometer uses a conventional Fabry-Perot resonant cavity to absorb a different portion of the spectrum and transmit any unabsorbed radiation outside this window. This device can be used to measure the absolute temperature of an object by comparing the relative signals in the two spectral bands. The spectral responsivity and detectivity, and thermal response time were > 10 V/W, > 10 cm Hz/W, and 1.13 ms to filtered blackbody infrared radiation between (2-16) µm. The microbolometer voltage noise power spectral density was reduced by annealing the microbolometers in vacuum at 300 °C.
我们研究了一种利用双层结构的非制冷红外（IR）探测器。这是通过在垂直方向上组合两个微测辐射热计堆叠来实现的，以在长波红外（LWIR）区域的两个不同光谱窗口实现高红外吸收率。此外，我们研究了非晶硅锗氧化物（SiGeO）作为红外敏感材料，以及超表面来控制与标准法布里-珀罗腔相互作用的红外吸收/反射。底部微测辐射热计使用超表面选择性地吸收部分光谱，并反射此窗口范围之外的辐射。同时，顶部微测辐射热计使用传统的法布里-珀罗共振腔来吸收光谱的不同部分，并透射此窗口之外的任何未吸收的辐射。通过比较两个光谱带中的相对信号，该器件可用于测量物体的绝对温度。在（2-16）µm 之间，对滤波黑体红外辐射的光谱响应率和探测率以及热响应时间分别大于 10V/W、大于 10cmHz/W 和 1.13ms。通过在 300°C 的真空中退火微测辐射热计，可以降低微测辐射热计的电压噪声功率谱密度。
