van den Brink Bram, Alijani Farbod, Ghatkesar Murali Krishna
Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628CD Delft, The Netherlands.
Micromachines (Basel). 2019 Feb 26;10(3):162. doi: 10.3390/mi10030162.
An experimental setup to perform dynamic analysis of a micro- and nano-mechanical system in vacuum, gas, and liquid is presented. The setup mainly consists of a piezoelectric excitation part and the chamber that can be either evacuated for vacuum, or filled with gas or water. The design of the piezoelectric actuator was based on a Langevin transducer. The chamber is made out of materials that can sustain: vacuum, variety of gases and different types of liquids (mild acids, alkalies, common alcohols and oils). All the experiments were performed on commercial cantilevers used for contact and tapping mode Atomic Force Microscopy (AFM) with stiffness 0.2 N/m and 48 N/m, respectively, in vacuum, air and water. The performance of the setup was evaluated by comparing the measured actuator response to a finite element model. The frequency responses of the two AFM cantilevers measured were compared to analytical equations. A vacuum level of 0.6 mbar was obtained. The setup has a bandwidth of 10⁻550 kHz in vacuum and air, and a bandwidth of 50⁻550 kHz in liquid. The dynamic responses of the cantilevers show good agreement with theory in all media.
本文介绍了一种用于在真空、气体和液体环境中对微纳机械系统进行动态分析的实验装置。该装置主要由压电激励部分和一个腔室组成，该腔室既可以抽真空形成真空环境，也可以填充气体或水。压电致动器的设计基于兰姆波换能器。腔室由能够承受真空、多种气体和不同类型液体（弱酸、碱、普通醇类和油类）的材料制成。所有实验均在用于接触模式和轻敲模式原子力显微镜（AFM）的商用悬臂梁上进行，在真空、空气和水中，其刚度分别为0.2 N/m和48 N/m。通过将测量的致动器响应与有限元模型进行比较，评估了该装置的性能。将测量的两种AFM悬臂梁的频率响应与解析方程进行了比较。获得了0.6毫巴的真空度。该装置在真空和空气中的带宽为10⁻550 kHz，在液体中的带宽为50⁻550 kHz。悬臂梁在所有介质中的动态响应与理论结果吻合良好。
