Zhou T, Wang H, Fox O J L, Sawhney K J S
Diamond Light Source Ltd., Harwell Science and Innovation Campus, Didcot OX11 0DE, United Kingdom.
Rev Sci Instrum. 2019 Feb;90(2):021706. doi: 10.1063/1.5057712.
X-ray mirrors are widely used in beamlines and laboratories as focusing or collimating optics. As well as the highly accurate processes used to fabricate them, optimized alignment of X-ray mirrors also plays an important role in achieving an ideal X-ray beam. Currently, knife-edge scans are the most often used method for aligning X-ray mirrors, which can characterize the focal size and tune the alignment iteratively. However, knife-edge scanning provides only one-dimensional information and this method suffers from being time-consuming and requiring a high-resolution piezo translation stage. Here we describe a straightforward and non-iterative method for mirror alignment by measuring the relationship between the tilt aberration and the misaligned pitch angle, which is retrieved by an at-wavelength metrology technique using a randomly shaped wavefront modulator. Software and a graphical user interface have been developed to automate the alignment process. Combining the user-friendly interface and the flexibility of the at-wavelength metrology technique, we believe the proposed method and software can benefit researchers working at synchrotron facilities and on laboratory sources.
X射线镜作为聚焦或准直光学元件，在光束线和实验室中被广泛使用。除了用于制造它们的高精度工艺外，X射线镜的优化对准在实现理想的X射线束方面也起着重要作用。目前，刀口扫描是最常用的X射线镜对准方法，它可以表征焦斑尺寸并迭代调整对准。然而，刀口扫描仅提供一维信息，并且该方法存在耗时且需要高分辨率压电平移台的问题。在这里，我们描述了一种通过测量倾斜像差与失准俯仰角之间的关系来进行镜面对准的直接且非迭代的方法，该关系是通过使用随机形状波前调制器的波长计量技术获得的。已经开发了软件和图形用户界面来自动化对准过程。结合用户友好的界面和波长计量技术的灵活性，我们相信所提出的方法和软件可以使在同步加速器设施和实验室光源上工作的研究人员受益。
