一种无膜光纤法布里-珀罗气体压力传感器。

A diaphragm-free fiber Fabry-Perot gas pressure sensor.

作者信息

Zhang L, Jiang Y, Gao H, Jia J, Cui Y, Ma W, Wang S, Hu J

机构信息

School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.

Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China.

出版信息

Rev Sci Instrum. 2019 Feb;90(2):025005. doi: 10.1063/1.5055660.

DOI:10.1063/1.5055660

PMID:30831712

Abstract

A diaphragm-free fiber gas pressure sensor based on the extrinsic Fabry-Perot interferometer (EFPI) is proposed and experimentally demonstrated. The sensor is fabricated by fusion splicing a sandwich structure of a single mode fiber, a hollow core fiber (HCF), and a coreless fiber. A femtosecond (fs) laser is employed to drill a micro-channel on the side wall of the HCF to allow gas entering/exiting the HCF. The refractive index of the gas has a linear relationship with the gas pressure. Thus, the gas pressure can be detected by investigating the optical path difference of the EFPI. The experimental results show that the proposed sensor exhibits a high gas pressure sensitivity of ∼1.80 µm/MPa from vacuum to 10 MPa at room temperature. Pressure responses under high temperatures are also investigated. The proposed sensor has properties of robust structure, miniature size, large measuring range, and high sensitivity.

摘要

提出并通过实验证明了一种基于外腔法布里-珀罗干涉仪（EFPI）的无隔膜光纤气体压力传感器。该传感器通过熔接单模光纤、空心光纤（HCF）和无芯光纤的三明治结构制成。采用飞秒（fs）激光在HCF的侧壁上钻出微通道，以使气体进入/离开HCF。气体的折射率与气体压力呈线性关系。因此，可以通过研究EFPI的光程差来检测气体压力。实验结果表明，所提出的传感器在室温下从真空到10 MPa表现出约1.80 µm/MPa的高气敏性。还研究了高温下的压力响应。所提出的传感器具有结构坚固、尺寸微小、测量范围大、灵敏度高的特点。