High-speed adaptive optics using bimorph deformable x-ray mirrors.

Recently, the dynamic performance of piezo-electric deformable "bimorph" mirrors for synchrotron radiation and X-ray free electron laser sources has been characterized and significantly improved. This innovation enables high intensity X-ray beams to be rapidly focused or defocused to either match to the size of the sample under test or to select different sized regions of interest in larger samples. In this paper, we extend these results by monitoring a bimorph mirror using a combination of ex situ metrology instruments. Comparison between results from the Diamond-NOM (Nanometre Optical Metrology) slope profiler, a Fizeau interferometer, and Zygo ZPS distance measuring probes shows that bimorph X-ray mirrors can reliably and accurately be driven at 1 Hz using advanced features recently added to the high voltage (HV), bipolar "HV-Adaptos" power supply from CAEN.