McKenney Christopher M, Austermann Jason E, Beall James A, Dober Bradley J, Duff Shannon M, Gao Jiansong, Hilton Gene C, Hubmayr Johannes, Li Dale, Ullom Joel N, Van Lanen Jeff L, Vissers Michael R
National Institute of Standards and Technology, Boulder, Colorado 80305, USA.
SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA.
Rev Sci Instrum. 2019 Feb;90(2):023908. doi: 10.1063/1.5037301.
We present a superconducting micro-resonator array fabrication method that is scalable and reconfigurable and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of 2.7 × 10. We exploit this finding to increase the yield of the BLAST-TNG 250 μm production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
我们提出了一种超导微谐振器阵列制造方法，该方法具有可扩展性和可重构性，并且针对高复用因子进行了优化。该方法使用在步进光刻掩模版上图案化的尺寸均匀的小片作为阵列的构建块。我们在由氮化钛超导薄膜制成的101元件微波动态电感探测器（MKID）阵列上展示了这种技术。表征显示，最大分数频率间距偏差为1.5%，主要是由整个晶圆上平滑变化的材料参数引起的。然而，局部偏差在分数频率间距中呈现高斯分布，标准偏差为2.7×10。我们利用这一发现，通过在阵列中物理和频率空间上都靠近放置谐振器，提高了BLAST-TNG 250μm生产晶圆的成品率。该阵列由1836个偏振敏感的MKID组成，分三个复用组布线。我们展示了阵列设计，并表明所实现的成品率与我们的频率碰撞模型一致，并且与其他低温探测器技术所达到的成品率相当。
