Rau E I, Karaulov V Yu, Zaitsev S V
Physics Faculty, Moscow State University, 119991 Moscow, Russia.
Rev Sci Instrum. 2019 Feb;90(2):023701. doi: 10.1063/1.5054746.
A new configuration of semiconductor detectors for backscattered electrons for a scanning electron microscope (SEM) is presented. The result of the optimization was the possibility to extract the information about the spatial relief (3D topology) of the sample and its subsurface structure (3D tomography) in the simplest way. The detector consists of 8 sensors-semiconductor plates, positioned in a certain way. The proposed method was tested on real structures having a surface micro relief or a subsurface volume structure. Experiments and simple calculations show increased effectiveness and a high signal-noise ratio in the proposed method. This is important, particularly for studying the radiation-sensitive biomedical tissue in SEM.
本文介绍了一种用于扫描电子显微镜（SEM）背散射电子的新型半导体探测器配置。优化的结果是能够以最简单的方式提取有关样品空间形貌（3D拓扑结构）及其亚表面结构（3D断层扫描）的信息。该探测器由8个传感器——半导体板组成，以特定方式排列。所提出的方法在具有表面微形貌或亚表面体积结构的实际结构上进行了测试。实验和简单计算表明，该方法具有更高的有效性和高信噪比。这一点很重要，特别是对于在扫描电子显微镜中研究对辐射敏感的生物医学组织而言。
