Department of Mathematics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.
Department of Physical Electronics, Faculty of Physics, Lomonosov Moscow State University, Moscow 119991, Russia.
Ultramicroscopy. 2019 Dec;207:112830. doi: 10.1016/j.ultramic.2019.112830. Epub 2019 Aug 23.
We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.
我们提出了一种新的阴影恢复形状（SFS）技术，用于利用扫描电子显微镜（SEM）改善相对平滑表面形貌的 3D 表面重建和成像。新的背散射电子探测器板的布置允许降低电子探针的初始能量，这使得这种 SEM 技术适用于像生物组织这样对辐射敏感的样品。实验表明该方法的有效性很高，它提高了信号的梯度灵敏度和信噪比。
