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台湾光子源光束线光学元件的计量学

Metrology for optical components of Taiwan Photon Source beamlines.

作者信息

Wang Duan-Jen, Lin Shang-Wei, Fu Huang-Wen, Fung Hok-Sum, Wang Tai-Yuan

机构信息

National Synchrotron Radiation Research Center, No. 101, Hsin-Ann Road, Hsinchu 30076, Taiwan.

出版信息

Rev Sci Instrum. 2019 Feb;90(2):021715. doi: 10.1063/1.5054705.

DOI:10.1063/1.5054705
PMID:30831741
Abstract

To ensure the high performance of beamlines in Taiwan Photon Source, the metrology of the beamline optical components is essential to realize the theoretical optical simulation. The design and performance of a long-trace profiler (LTP) with moving optical head is described. A LTP is used as a metrological tool for the assembly and correction of optical components at the beamline. For a water-cooled mirror, a LTP serves to optimize the surface profile to a slope error of 0.1 µrad (rms) and adequate thermal conductance. To correct a bendable cooling mirror in a twisted condition, the sagittal slope is decreased by a screw adjustment through the LTP measurement. For the double-crystal monochromator (DCM) with flow-induced vibrations, we proposed an approach to stiffen the bellows hose partially inside the vacuum chamber. From an investigation of the vibrational spectra of the DCM before and after the treatment with the aid of the autocollimator, the current approach is confirmed to be an effective solution for suppression of vibration.

摘要

为确保台湾光源光束线的高性能,光束线光学元件的计量对于实现理论光学模拟至关重要。本文描述了一种具有移动光学头的长程轮廓仪(LTP)的设计与性能。LTP用作光束线光学元件组装和校正的计量工具。对于水冷镜,LTP用于将表面轮廓优化至均方根斜率误差为0.1微弧度,并具有足够的热导率。为校正处于扭曲状态的可弯曲冷却镜,通过LTP测量,利用螺丝调节降低弧矢斜率。对于存在流动引起振动的双晶单色仪(DCM),我们提出了一种在真空室内部分加固波纹管软管的方法。通过在自准直仪辅助下对处理前后DCM振动光谱的研究,证实当前方法是抑制振动的有效解决方案。

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