Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China.
Microsystem and Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China.
Sensors (Basel). 2019 Mar 3;19(5):1077. doi: 10.3390/s19051077.
Flexible strain sensors have a wide range of applications in biomedical science, aerospace industry, portable devices, precise manufacturing, etc. However, the manufacturing processes of most flexible strain sensors previously reported have usually required high manufacturing costs and harsh experimental conditions. Besides, research interests are often focused on improving a single attribute parameter while ignoring others. This work aims to propose a simple method of manufacturing flexible graphene-based strain sensors with high sensitivity and fast response. Firstly, oxygen plasma treats the substrate to improve the interfacial interaction between graphene and the substrate, thereby improving device performance. The graphene solution is then sprayed using a soft PET mask to define a pattern for making the sensitive layer. This flexible strain sensor exhibits high sensitivity (gauge factor ~100 at 1% strain), fast response (response time: 400⁻700 μs), good stability (1000 cycles), and low overshoot (<5%) as well. Those processes used are compatible with a variety of complexly curved substrates and is expected to broaden the application of flexible strain sensors.
柔性应变传感器在生物医学科学、航空航天工业、便携式设备、精密制造等领域有着广泛的应用。然而，之前报道的大多数柔性应变传感器的制造工艺通常需要高制造成本和苛刻的实验条件。此外，研究兴趣往往集中在单一属性参数的提高，而忽略了其他方面。本工作旨在提出一种简单的制造基于石墨烯的柔性应变传感器的方法，该传感器具有高灵敏度和快速响应。首先，氧等离子体处理基底以提高石墨烯和基底之间的界面相互作用，从而改善器件性能。然后使用柔软的 PET 掩模喷涂石墨烯溶液以定义用于制作敏感层的图案。这种柔性应变传感器表现出高灵敏度（应变系数在 1%应变时约为 100）、快速响应（响应时间：400-700 μs）、良好的稳定性（1000 个循环）和低过冲（<5%）。所使用的工艺与多种复杂弯曲基底兼容，有望拓宽柔性应变传感器的应用范围。
