Faculty of Physical Engineering/Computer Sciences, University of Applied Sciences Zwickau, D-08056 Zwickau, Germany.
Fraunhofer Application Center for Optical Metrology and Surface Technologies, D-08056 Zwickau, Germany.
Sensors (Basel). 2019 Mar 7;19(5):1152. doi: 10.3390/s19051152.
A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.
已经开发出一种用于描述聚合物（如波导聚合物）中交联差异的方法。该方法基于利用低相干干涉仪结合成像光谱仪进行无扫描信息采集。通过引入一种新颖的分析算法，将记录的光谱相位数据解释为波长相关的光学厚度，该光学厚度与折射率相关，因此与交联度相关。在这项工作中，该方法在硬件和算法实现及其准确性方面进行了描述。比较测量和误差估计表明，折射率的精度在 10 范围内。最后，对具有横向定义的交联差异的光刻生产样品进行了表征。结果表明，光学厚度的差异可以分辨出±1.5μm。
