Sun Yue, Shen Hua, Li Xuan, Li Jia, Gao Jinming, Zhu Rihong
Appl Opt. 2019 Feb 10;58(5):1253-1260. doi: 10.1364/AO.58.001253.
Phase-shifting point diffraction interferometers are used to measure large-aperture spherical optical elements because of their high level of measurement accuracy. As the most commonly used phase-shifting method, piezoelectric ceramic transducers are faced with nonlinear problems. Wavelength tuning is typically used to solve the phase-shifting problem; however, it is sensitive to environmental vibrations and light intensity changes during tuning. Therefore, a global optimization iterative algorithm based on interferogram normalization is proposed here. The method is insensitive to noise, defects, and light intensity changes and has a strong ability to resist environmental disturbance. Simulations and experiments are performed to verify the effectiveness of the proposed method.
相移点衍射干涉仪因其高精度的测量水平而被用于测量大口径球面光学元件。作为最常用的相移方法，压电陶瓷换能器面临非线性问题。波长调谐通常用于解决相移问题；然而，它在调谐过程中对环境振动和光强变化敏感。因此，本文提出了一种基于干涉图归一化的全局优化迭代算法。该方法对噪声、缺陷和光强变化不敏感，具有很强的抗环境干扰能力。通过仿真和实验验证了该方法的有效性。
