Zheng Donghui, Chen Lei, Kong Lu, Wang Chong, Hu Chenhui, Wang Yuntao, Zhu Wenhua, Zhu Rihong, Wulan Tuya
Appl Opt. 2020 Mar 10;59(8):2513-2520. doi: 10.1364/AO.384191.
With the development of high-power lasers for aerospace, electronics, etc., the demand for large-aperture planar optical elements has become more urgent, along with the demand for measurement methods. In this paper, the design of a 300 mm aperture vertical Fizeau spatial-temporal phase-shifting interferometer is discussed. Based on position difference between laser sources, the spatial phase-shifting technique is achieved by generating a laser source array on the focal plane of the collimation lens, and four pairs of coherent beams with different phase shifts are integrated in a vertical Fizeau interference system. Combined with a tunable laser diode, a temporal phase-shifting technique can be realized in any pair of coherent beams through wavelength tuning. The key techniques, which include laser duplication to introduce different phase shifts, conjugate imaging, and separation for interferograms, and assembly for a transmission flat, are demonstrated. The systematic error and position mismatch error of interferograms are eliminated. Comparison experiments are conducted between spatial and temporal phase-shifting techniques. A dynamic water surface is also measured to verify its capacity for detecting dynamic objects.
随着用于航空航天、电子等领域的高功率激光器的发展，对大口径平面光学元件的需求变得更加迫切，对测量方法的需求也随之增加。本文讨论了一种300毫米口径垂直菲索时空相移干涉仪的设计。基于激光源之间的位置差异，通过在准直透镜的焦平面上生成激光源阵列来实现空间相移技术，并且在垂直菲索干涉系统中集成了四对具有不同相移的相干光束。结合可调谐激光二极管，通过波长调谐可以在任何一对相干光束中实现时间相移技术。展示了包括引入不同相移的激光复制、共轭成像、干涉图分离以及透射平板组装等关键技术。消除了干涉图的系统误差和位置失配误差。进行了空间和时间相移技术之间的对比实验。还对动态水面进行了测量，以验证其检测动态物体的能力。
