Suntsov Sergiy, Rüter Christian E, Kip Detlef
Appl Opt. 2019 Mar 10;58(8):2076-2080. doi: 10.1364/AO.58.002076.
We report on a miniature all-fiber dual parameter sensor capable of simultaneous measurement of the refractive index (RI) and temperature of fluids and gases. The high-sensitivity sensing element is comprised of two Fabry-Perot (FP) micro-resonators fabricated in a single-mode fiber and has a total length of <100 μm. The RI sensing cavity is formed by diamond blade dicing, whereas a thinner silicon inlay glued into it serves as a temperature sensor. The sensor's performance was tested on sucrose solutions over a range of temperatures. For the evaluation of the backreflected FP spectra, phase tracking of the characteristic Fourier transform components was used. Good accuracy (0.01°C) and linearity of temperature measurement with Si inlay with sensitivity 0.097 rad/°C (85.2 pm/°C) were found, whereas the open cavity allowed for reliable temperature-compensated measurements of 10 RI steps with 290 rad/RIU (1130 nm/RIU) sensitivity.
我们报道了一种微型全光纤双参数传感器，它能够同时测量流体和气体的折射率（RI）及温度。高灵敏度传感元件由两个在单模光纤中制造的法布里 - 珀罗（FP）微谐振器组成，总长度小于100μm。RI传感腔通过金刚石刀片切割形成，而粘贴在其中的较薄硅镶嵌物用作温度传感器。该传感器在一系列温度下的蔗糖溶液上进行了性能测试。为了评估背向反射的FP光谱，使用了特征傅里叶变换分量的相位跟踪。发现使用硅镶嵌物进行温度测量时具有良好的精度（0.01°C）和线性度，灵敏度为0.097 rad/°C（85.2 pm/°C），而开放腔允许以290 rad/RIU（1130 nm/RIU）的灵敏度对10个RI步长进行可靠的温度补偿测量。
