Pevec Simon, Donlagic Denis
Opt Express. 2014 Jun 30;22(13):16241-53. doi: 10.1364/OE.22.016241.
This paper presents a highly-sensitive, miniature, all-silica, dual parameter fiber-optic Fabry-Perot sensor, which is suitable for independent measurement of the refractive index and the temperature of the fluid surrounding the sensor. The experimental sensor was produced by a micromachining process based on the selective etching of doped silica glass and a simple assembly procedure that included fiber cleaving, splicing and etching of optical fibers. The presented sensor also allows for direct compensation of the temperature's effect on the fluid's refractive index change and consequently provides opportunities for the detection of very small changes in the surrounding fluid's composition. A measurement resolution of 2x10(-7) RIU was demonstrated experimentally for a component of the refractive index that is related purely to the fluid's composition. This resolution was achieved under non-stabilized temperature conditions. The temperature resolution of the sensor proved to be about 10(-3) °C. These high resolution measurements were obtained by phase-tracking of characteristic components in a Fourier transform of sensor's optical spectrum.
本文介绍了一种高灵敏度、微型、全硅双参数光纤法布里-珀罗传感器，适用于独立测量传感器周围流体的折射率和温度。实验传感器通过基于掺杂石英玻璃选择性蚀刻的微加工工艺和包括光纤切割、熔接和蚀刻的简单组装程序制成。所展示的传感器还能够直接补偿温度对流体折射率变化的影响，从而为检测周围流体成分的微小变化提供了机会。实验证明，对于仅与流体成分相关的折射率分量，测量分辨率为2×10⁻⁷RIU。该分辨率是在非稳定温度条件下实现的。传感器的温度分辨率约为10⁻³°C。这些高分辨率测量是通过对传感器光谱傅里叶变换中的特征分量进行相位跟踪获得的。
