Fabrication and analysis of tantalum pentoxide optical waveguide resonator of high thermal stability.

We fabricated waveguide resonators with high thermal stability using tantalum pentoxide thin film covered with PECVD silicon dioxide cladding. Without complex athermal design, low temperature dependence of 7.4 pm/°C and 8.15 pm/°C were measured in waveguide Bragg gratings (WBG) and Fabry-Perot resonator sandwiched by a pair of identical WBG mirrors, respectively. Suggested by semi-analytical perturbation calculations, the athermal properties of tantalum pentoxide waveguide grating are attributed not only to the low thermo-optical coefficient in tantalum pentoxide thin film but also to the strong chromatic dispersion of the guided modes. Guidelines are proposed to design waveguide-based frequency devices of low thermo-optical effect without complex athermal design.