Park J B, Choi W S, Chung T H, Lee S H, Kwak M K, Ha J S, Jeong T
Opt Express. 2019 Mar 4;27(5):6832-6841. doi: 10.1364/OE.27.006832.
We report the transfer printing of GaN-based microscale vertical-type light-emitting diodes (μ-VLEDs) using a functional layer and a biomimetic stamp. An oxide-based functional layer is inserted onto the structure of a μ-VLED and used to separate the chip from the μ-VLED wafer by absorbing the pulse of a UV pulse laser during pick-up of the transfer printing process. Polydimethylsiloxane (PDMS)-based biomimetic stamps have been fabricated to mimic the gecko lizard cilia for improved adhesion and repeatability. The biomimetic stamp has an adhesion force of 25.6 N/cm, which is 12 times the adhesion of a flat stamp; an adhesion force of 10 N/cm or more was maintained after 100,000 repeated adhesion tests. A flexible 10 × 10 prototype array on a polyimide substrate was fabricated, and its bending test results indicated that the strain effect on the forward voltage and the output power was less than 1%. The stable bending test results of the prototype indicate that μ-VLEDs using biomimetic stamps allow the necessary stability for practical transfer printing.
我们报告了使用功能层和仿生印章对基于氮化镓的微型垂直型发光二极管(μ-VLED)进行转移印刷的方法。在μ-VLED的结构上插入一层氧化物基功能层,并在转移印刷过程的拾取步骤中,通过吸收紫外脉冲激光的脉冲,该功能层用于将芯片与μ-VLED晶圆分离。已经制造出基于聚二甲基硅氧烷(PDMS)的仿生印章,以模仿壁虎的纤毛,从而提高附着力和可重复性。该仿生印章的附着力为25.6 N/cm,是平面印章附着力的12倍;在进行100,000次重复粘附测试后,仍保持10 N/cm或更高的附着力。在聚酰亚胺基板上制作了一个10×10的柔性原型阵列,其弯曲测试结果表明,应变对正向电压和输出功率的影响小于1%。该原型的稳定弯曲测试结果表明,使用仿生印章的μ-VLED为实际转移印刷提供了必要的稳定性。