使用具有优化声学谐振器的11μm分布反馈量子级联激光器的离轴量子增强光声光谱传感器。

Off-beam QEPAS sensor using an 11-μm DFB-QCL with an optimized acoustic resonator.

作者信息

Rousseau Roman, Loghmari Zeineb, Bahriz Michael, Chamassi Kaim, Teissier Roland, Baranov Alexei N, Vicet Aurore

出版信息

Opt Express. 2019 Mar 4;27(5):7435-7446. doi: 10.1364/OE.27.007435.

DOI:10.1364/OE.27.007435

Abstract

An off-beam quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor was designed for ethylene detection using a distributed-feedback quantum cascade laser (QCL) operating in the mid-infrared around 11 μm. The acoustic microresonator configuration was experimentally optimized using an original open-cell photoacoustic setup with a MEMS microphone. Correction factors based on theoretical acoustic models were introduced in order to accurately describe the response of millimeter-sized acoustic resonators. The optimized QEPAS sensor exhibited a limit of detection of 60 ppb for 60 s integration, giving a NNEA of 4.8 × 10 W·cm·Hz.

摘要

设计了一种离轴石英增强光声光谱（QEPAS）传感器，用于使用在11μm左右中红外波段工作的分布反馈量子级联激光器（QCL）检测乙烯。使用带有MEMS麦克风的原始开孔光声装置对声学微谐振器配置进行了实验优化。引入了基于理论声学模型的校正因子，以准确描述毫米级声学谐振器的响应。优化后的QEPAS传感器在60秒积分时的检测限为60 ppb，噪声等效吸收系数为4.8×10 W·cm·Hz。