Mirsense, Nanno-INNOV, building 863, 8 Avenue de la Vauve, 91120 Palaiseau, France.
DPHY, ONERA, Université Paris Saclay, F-91123 Palaiseau, France.
Sensors (Basel). 2019 Mar 19;19(6):1362. doi: 10.3390/s19061362.
We have designed and fabricated a custom quartz tuning fork (QTF) with a reduced fundamental frequency; a larger gap between the prongs; and the best quality factor in air at atmospheric conditions ever reported, to our knowledge. Acoustic microresonators have been added to the QTF in order to enhance the sensor sensitivity. We demonstrate a normalized noise equivalent absorption () of 3.7 × 10 W.cm.Hz for CO₂ detection at atmospheric pressure. The influence of the inner diameter and length of the microresonators has been studied, as well as the penetration depth between the QTF's prongs. We investigated the acoustic isolation of our system and measured the Allan deviation of the sensor.
我们设计并制造了一个定制的石英音叉(QTF),其基频降低;叉齿之间的间隙更大;而且据我们所知,在大气条件下,它具有有史以来报告的最佳品质因数。为了提高传感器的灵敏度,我们在 QTF 上添加了声学微谐振器。我们展示了在大气压下对 CO₂检测的归一化噪声等效吸收()为 3.7×10 W.cm.Hz。研究了微谐振器的内径和长度以及 QTF 叉齿之间的穿透深度对传感器灵敏度的影响。我们研究了系统的声学隔离,并测量了传感器的艾伦偏差。