具有多谐振频率的锂掺杂氧化锌薄膜压电能量收集器的制备与表征

Fabrication and Characterization of the Li-Doped ZnO Thin Films Piezoelectric Energy Harvester with Multi-Resonant Frequencies.

作者信息

Zhao Xiaofeng, Li Sen, Ai Chunpeng, Liu Hongmei, Wen Dianzhong

机构信息

The Key Laboratory of Electronics Engineering, College of Heilongjiang Province, Heilongjiang University, Harbin 150080, China.

出版信息

Micromachines (Basel). 2019 Mar 26;10(3):212. doi: 10.3390/mi10030212.

DOI:10.3390/mi10030212

PMID:30917569

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6471918/

Abstract

A novel piezoelectric energy harvester with multi-resonant frequencies based on Li-doped ZnO (LZO) thin films is proposed in this paper, consisting of an elastic element with three (or more) different length cantilever beam arrays and a piezoelectric structure (Al/Li-doped ZnO/Pt/Ti). The LZO thin films of piezoelectric structure were prepared on Pt/Ti/SiO₂/Si by using a radio frequency (RF) magnetron sputtering method under certain process conditions. When the LZO thin films were deposited with an LZO target concentration of 5 wt%, the piezoelectric coefficient was 9.86 pm/V. Based on this, the energy harvester chips were fabricated on a <100> silicon substrate using micro-electromechanical systems (MEMS) technology, and its performance can be measured by fixing it to a printed circuit board (PCB) test substrate. The experimental results show that, when exerting an external vibration acceleration of 2.2 g and a vibration frequency of 999 Hz, the energy harvester can achieve a big load voltage of 1.02 V at a load resistance of 600 kΩ, and a high load power of 2.3 µW at a load resistance of 200 kΩ.

摘要

本文提出了一种基于锂掺杂氧化锌（LZO）薄膜的具有多谐振频率的新型压电能量采集器，它由具有三个（或更多）不同长度悬臂梁阵列的弹性元件和压电结构（Al/Li掺杂ZnO/Pt/Ti）组成。采用射频（RF）磁控溅射法在一定工艺条件下在Pt/Ti/SiO₂/Si上制备了压电结构的LZO薄膜。当以5 wt%的LZO靶浓度沉积LZO薄膜时，压电系数为9.86 pm/V。在此基础上，利用微机电系统（MEMS）技术在<100>硅衬底上制造了能量采集器芯片，通过将其固定在印刷电路板（PCB）测试衬底上来测量其性能。实验结果表明，当施加2.2 g的外部振动加速度和999 Hz的振动频率时，能量采集器在600 kΩ的负载电阻下可实现1.02 V的大负载电压，在200 kΩ的负载电阻下可实现2.3 µW的高负载功率。