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短激光脉冲与高反射镜上模型污染微粒子的相互作用。

Interaction of short laser pulses with model contamination microparticles on a high reflector.

出版信息

Opt Lett. 2019 Apr 1;44(7):1844-1847. doi: 10.1364/OL.44.001844.

DOI:10.1364/OL.44.001844
PMID:30933162
Abstract

The response of model contamination particles located on the surface of a multilayer dielectric mirror when exposed to 1053 nm laser pulses of 10 ps or 0.6 ps duration is investigated. Four different particle types were studied: stainless steel, borosilicate glass, polyethylene, and polytetrafluoroethylene, all having an average diameter of about 40 μm. Irradiation with one laser pulse caused particles to eject from the surface with an onset fluence in the range 5× to 100×, depending on the particle type, below the particle-free, laser-induced damage threshold of the mirror. Morphological analysis showed, however, that the ejection process always generated ablation craters and/or secondary contamination, both of which can degrade the performance of the optic during subsequent pulses. Ejection and damage mechanisms are discussed for each particle type.

摘要

研究了暴露在 1053nm 激光脉冲(持续时间为 10ps 或 0.6ps)下位于多层介电反射镜表面的模型污染颗粒的响应。研究了四种不同类型的颗粒:不锈钢、硼硅酸盐玻璃、聚乙烯和聚四氟乙烯,它们的平均直径约为 40μm。用一个激光脉冲照射会导致颗粒以起始通量从表面射出,起始通量范围为 5×到 100×,具体取决于颗粒类型,低于无颗粒、激光诱导的反射镜损伤阈值。然而,形态分析表明,喷射过程总是会产生烧蚀坑和/或二次污染,这两者都会在后续脉冲中降低光学器件的性能。讨论了每种颗粒类型的喷射和损伤机制。

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