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1053纳米皮秒脉冲激光诱导二氧化硅涂层和熔融石英改性中缺陷的作用:I. 损伤形态

The role of defects in laser-induced modifications of silica coatings and fused silica using picosecond pulses at 1053 nm: I. Damage morphology.

作者信息

Ly S, Shen N, Negres R A, Carr C W, Alessi D A, Bude J D, Rigatti A, Laurence T A

出版信息

Opt Express. 2017 Jun 26;25(13):15161-15178. doi: 10.1364/OE.25.015161.

DOI:10.1364/OE.25.015161
PMID:28788946
Abstract

Laser-induced damage with ps pulse widths straddles the transition from intrinsic, multi-photon ionization and avalanche ionization-based ablation with fs pulses to defect-dominated, thermal-based damage with ns pulses. We investigated the morphology of damage for fused silica and silica coatings between 1 ps and 60 ps at 1053 nm. Using calibrated laser-induced damage experiments, in situ imaging, and high-resolution optical microscopy, atomic force microscopy, and scanning electron microscopy, we show that defects play an important role in laser-induced damage down to 1 ps. Three types of damage are observed: ablation craters, ultra-high density pits, and smooth, circular depressions with central pits. For 10 ps and longer, the smooth, circular depressions limit the damage performance of fused silica and silica coatings. The observed high-density pits and material removal down to 3 ps indicate that variations in surface properties limit the laser-induced damage onset to a greater extent than expected below 60 ps. Below 3 ps, damage craters are smoother although there is still evidence as seen by AFM of inhomogeneous laser-induced damage response very near the damage onset. These results show that modeling the damage onset only as a function of pulse width does not capture the convoluted processes leading to laser induced damage with ps pulses. It is necessary to account for the effects of defects on the processes leading to laser-induced damage. The effects of isolated defects or inhomogeneities are most pronounced above 3 ps but are still discernible and possibly important down to the shortest pulse width investigated here.

摘要

皮秒脉冲宽度的激光诱导损伤跨越了从基于飞秒脉冲的本征多光子电离和雪崩电离消融到基于纳秒脉冲的缺陷主导热损伤的转变。我们研究了1053nm波长下1皮秒至60皮秒之间熔融石英和二氧化硅涂层的损伤形态。通过校准的激光诱导损伤实验、原位成像以及高分辨率光学显微镜、原子力显微镜和扫描电子显微镜,我们表明缺陷在低至1皮秒的激光诱导损伤中起着重要作用。观察到三种类型的损伤:烧蚀坑、超高密度凹坑以及带有中心凹坑的光滑圆形凹陷。对于10皮秒及更长时间,光滑的圆形凹陷限制了熔融石英和二氧化硅涂层的损伤性能。观察到的高密度凹坑以及低至3皮秒的材料去除表明,表面性质的变化在比预期更大的程度上限制了低于60皮秒时的激光诱导损伤起始。低于3皮秒时,损伤坑更光滑,尽管原子力显微镜仍显示在损伤起始非常近的区域存在不均匀的激光诱导损伤响应迹象。这些结果表明,仅将损伤起始建模为脉冲宽度的函数并不能捕捉导致皮秒脉冲激光诱导损伤的复杂过程。有必要考虑缺陷对导致激光诱导损伤过程的影响。孤立缺陷或不均匀性的影响在3皮秒以上最为明显,但在此处研究的最短脉冲宽度下仍可辨别且可能很重要。

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