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用于多光谱成像的人工复眼的设计与制造

Design and Fabrication of an Artificial Compound Eye for Multi-Spectral Imaging.

作者信息

Cao Axiu, Pang Hui, Zhang Man, Shi Lifang, Deng Qiling, Hu Song

机构信息

Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2019 Mar 25;10(3):208. doi: 10.3390/mi10030208.

Abstract

The artificial compound eye (ACE) structure is a new type of miniaturized, lightweight and intelligent imaging system. This paper has proposed to design a multi-spectral ACE structure to enable the structure to achieve multi-spectral information on the basis of imaging. The sub-eyes in the compound eye structure have been designed as diffractive beam splitting lenses with the same focal length of 20 mm, but with the different designed center wavelengths of 650 nm, 532 nm, and 445 nm, respectively. The proximity exposure lithography and reactive ion etching process were used to prepare the designed multi-spectral ACE structure, and the spectral splitting and multi-spectral imaging experiments were carried out to verify the multi-spectral imaging function of the structure without axial movement. Furthermore, the structure can be designed according to actual requirements, which can be applied to covert reconnaissance, camouflage identification, gas leakage or other fields.

摘要

人工复眼(ACE)结构是一种新型的小型化、轻量化和智能化成像系统。本文提出设计一种多光谱ACE结构,使该结构在成像的基础上能够获取多光谱信息。复眼结构中的子眼被设计为具有相同焦距20毫米的衍射分束透镜,但设计的中心波长分别为650纳米、532纳米和445纳米。采用接近式曝光光刻和反应离子刻蚀工艺制备了设计的多光谱ACE结构,并进行了光谱分离和多光谱成像实验,以验证该结构在无轴向移动情况下的多光谱成像功能。此外,该结构可根据实际需求进行设计,可应用于隐蔽侦察、伪装识别、气体泄漏等领域。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dbe5/6471791/7779c36eb8d2/micromachines-10-00208-g001.jpg

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