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基于氧化石墨烯/聚乙烯醇的混合微机电传感器湿度测量分析。

Analysis of a Hybrid Micro-Electro-Mechanical Sensor Based on Graphene Oxide/Polyvinyl Alcohol for Humidity Measurements.

机构信息

DIEEI, Dipartimento di Ingegneria Elettrica, Elettronica e Informatica, University of Catania, 95125, Catania, Italy.

Professorship of Measurement and Sensor Technology, Chemnitz University of Technology, ReichenhainerStraße 70, 09126 Chemnitz, Germany.

出版信息

Sensors (Basel). 2019 Apr 10;19(7):1720. doi: 10.3390/s19071720.

DOI:10.3390/s19071720
PMID:30974875
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6479286/
Abstract

In this paper, we present a redundant microsensor based on the bulk and etch silicononinsulator (BESOI) process for measuring relative humidity (RH), by using a grapheneoxide/polyvinylalcohol (GO/PVA) composite. The MEMS is a mechanical oscillator, composed of a proof mass with multilayer of nanomaterials (GO/PVA) and suspended by four crab-leg springs. The redundant approach realized concerns the use of different readout strategies in order to estimate the same measurand RH. This is an intriguing solution to realize a robust measurement system with multiple outputs, by using the GO/PVA as functional material. In the presence of RH variation, GO/PVA (1) changes its mass, and as consequence, a variation of the natural frequency of the integrated oscillator can be observed; and (2) varies its conductivity, which can be measured by using two integrated electrodes. The sensor was designed, analyzed and modeled; experimental results are reported here to demonstrate the effectiveness of our implementation.

摘要

在本文中，我们提出了一种基于体硅和绝缘体上硅（BESOI）工艺的冗余微传感器，用于通过使用氧化石墨烯/聚乙烯醇（GO/PVA）复合材料测量相对湿度（RH）。该 MEMS 是一个机械振荡器，由带有多层纳米材料（GO/PVA）的质量块和由四个蟹腿弹簧悬挂组成。冗余方法的实现涉及使用不同的读取策略来估计相同的测量量 RH。这是一种有趣的解决方案，可以通过使用 GO/PVA 作为功能材料来实现具有多个输出的稳健测量系统。在 RH 变化的情况下，GO/PVA（1）会改变其质量，因此可以观察到集成振荡器的固有频率发生变化；（2）其电导率发生变化，这可以通过使用两个集成电极来测量。对传感器进行了设计、分析和建模；本文报告了实验结果，以证明我们的实现的有效性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/6d0a6b3a893f/sensors-19-01720-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/5ca9c106b990/sensors-19-01720-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/a9b73fcfb980/sensors-19-01720-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/1e8d2e759e90/sensors-19-01720-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/847689371220/sensors-19-01720-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/b01f7ef562d2/sensors-19-01720-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/0aa82294af85/sensors-19-01720-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/f5cfc8635f94/sensors-19-01720-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/c7495f6feb4d/sensors-19-01720-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/c41282ac62f3/sensors-19-01720-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/119ff1842f65/sensors-19-01720-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/6b0b9a8fbfa4/sensors-19-01720-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/6d0a6b3a893f/sensors-19-01720-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/5ca9c106b990/sensors-19-01720-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/a9b73fcfb980/sensors-19-01720-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/1e8d2e759e90/sensors-19-01720-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/847689371220/sensors-19-01720-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/b01f7ef562d2/sensors-19-01720-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/0aa82294af85/sensors-19-01720-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/f5cfc8635f94/sensors-19-01720-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/c7495f6feb4d/sensors-19-01720-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/c41282ac62f3/sensors-19-01720-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/119ff1842f65/sensors-19-01720-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/6b0b9a8fbfa4/sensors-19-01720-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6279/6479286/6d0a6b3a893f/sensors-19-01720-g012.jpg

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