Bi Hengchang, Yin Kuibo, Xie Xiao, Ji Jing, Wan Shu, Sun Litao, Terrones Mauricio, Dresselhaus Mildred S
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, P. R. China.
Sci Rep. 2013;3:2714. doi: 10.1038/srep02714.
Humidity sensors have been extensively used in various fields, and numerous problems are encountered when using humidity sensors, including low sensitivity, long response and recovery times, and narrow humidity detection ranges. Using graphene oxide (G-O) films as humidity sensing materials, we fabricate here a microscale capacitive humidity sensor. Compared with conventional capacitive humidity sensors, the G-O based humidity sensor has a sensitivity of up to 37800% which is more than 10 times higher than that of the best one among conventional sensors at 15%-95% relative humidity. Moreover, our humidity sensor shows a fast response time (less than 1/4 of that of the conventional one) and recovery time (less than 1/2 of that of the conventional one). Therefore, G-O appears to be an ideal material for constructing humidity sensors with ultrahigh sensitivity for widespread applications.
湿度传感器已在各个领域得到广泛应用，在使用湿度传感器时会遇到诸多问题，包括灵敏度低、响应和恢复时间长以及湿度检测范围窄等。我们在此使用氧化石墨烯（G-O）薄膜作为湿度传感材料，制造了一种微型电容式湿度传感器。与传统电容式湿度传感器相比，基于G-O的湿度传感器在相对湿度为15%-95%时灵敏度高达37800%，比传统传感器中最佳的那个高出10倍以上。此外，我们的湿度传感器响应时间快（不到传统传感器的1/4）且恢复时间短（不到传统传感器的1/2）。因此，G-O似乎是构建具有超高灵敏度以广泛应用的湿度传感器的理想材料。
