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点缺陷反应对III-V族纳米线侧壁原子尺度粗糙度的重要性。

Importance of point defect reactions for the atomic-scale roughness of III-V nanowire sidewalls.

作者信息

Díaz Álvarez Adrian, Peric Nemanja, Franchina Vergel Nathali Alexandra, Nys Jean-Philippe, Berthe Maxime, Patriarche Gilles, Harmand Jean-Christophe, Caroff Philippe, Plissard Sébastien, Ebert Philipp, Xu Tao, Grandidier Bruno

机构信息

Univ. Lille, CNRS, Centrale Lille, ISEN, Univ. Valenciennes, UMR 8520-IEMN, F-59000 Lille, France.

出版信息

Nanotechnology. 2019 Aug 9;30(32):324002. doi: 10.1088/1361-6528/ab1a4e. Epub 2019 Apr 17.

DOI:10.1088/1361-6528/ab1a4e
PMID:30995632
Abstract

The surface morphology of III-V semiconductor nanowires (NWs) protected by an arsenic cap and subsequently evaporated in ultrahigh vacuum is investigated with scanning tunneling microscopy and scanning transmission electron microscopy. We show that the changes of the surface morphology as a function of the NW composition and the nature of the seed particles are intimately related to the formation and reaction of surface point defects. Langmuir evaporation close to the congruent evaporation temperature causes the formation of vacancies which nucleate and form vacancy islands on {110} sidewalls of self-catalyzed InAs NWs. However, for annealing temperatures much smaller than the congruent temperature, a new phenomenon occurs: group III vacancies form and are filled by excess As atoms, leading to surface As antisites. The resulting Ga adatoms nucleate with excess As atoms at the NW edges, producing monoatomic-step islands on the {110} sidewalls of GaAs NWs. Finally, when gold atoms diffuse from the seed particle onto the {110} sidewalls during evaporation of the protective As cap, Langmuir evaporation does not take place, leaving the sidewalls of InAsSb NWs atomically flat.

摘要

利用扫描隧道显微镜和扫描透射电子显微镜,研究了由砷帽保护并随后在超高真空中蒸发的III-V族半导体纳米线(NWs)的表面形貌。我们表明,表面形貌随NW组成和籽晶颗粒性质的变化与表面点缺陷的形成和反应密切相关。接近一致蒸发温度的朗缪尔蒸发会导致空位的形成,这些空位在自催化InAs NWs的{110}侧壁上形核并形成空位岛。然而,对于远低于一致温度的退火温度,会出现一种新现象:III族空位形成并被过量的As原子填充,导致表面As反位。产生的Ga吸附原子与NW边缘的过量As原子形核,在GaAs NWs的{110}侧壁上产生单原子台阶岛。最后,当金原子在保护性As帽蒸发期间从籽晶颗粒扩散到{110}侧壁上时,不会发生朗缪尔蒸发,使得InAsSb NWs的侧壁保持原子级平整。

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