Li Duo, Li Na, Su Xing, Liu Kan, Ji Peng, Wang Bo
Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China.
Micromachines (Basel). 2019 Apr 18;10(4):260. doi: 10.3390/mi10040260.
A multi-aperture atmospheric pressure plasma processing (APPP) method was proposed to structure the continuous phase plate (CPP). The APPP system was presented and removal investigation showed the removal function of APPP was of a high repeatability and robustness to the small disturbance of gas flows. A mathematical model for the multi-aperture structuring process was established and the simulation analysis indicated the advantages of the proposed method in terms of balancing the efficiency and accuracy of the process. The experimental results showed that multi-aperture APPP has the ability to structure a 30 mm × 30 mm CPP with the accuracy of 163.4 nm peak to valley (PV) and 31.7 nm root mean square (RMS).
提出了一种多孔径大气压等离子体处理（APPP）方法来构造连续相位板（CPP）。介绍了APPP系统，去除研究表明，APPP的去除功能对气流的小扰动具有高重复性和鲁棒性。建立了多孔径结构化过程的数学模型，模拟分析表明了该方法在平衡过程效率和精度方面的优势。实验结果表明，多孔径APPP能够构造出尺寸为30 mm×30 mm的CPP，其峰谷（PV）精度为163.4 nm，均方根（RMS）精度为31.7 nm。
