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光学正弦光栅的大气压等离子体处理

Atmospheric Pressure Plasma Processing of an Optical Sinusoidal Grid.

作者信息

Li Duo, Li Na, Su Xing, Ji Peng, Wang Bo

机构信息

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China.

出版信息

Micromachines (Basel). 2019 Nov 28;10(12):828. doi: 10.3390/mi10120828.

DOI:10.3390/mi10120828
PMID:31795261
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6953015/
Abstract

Sinusoidal grid with nanometric precision is adopted as a surface encoder to measure multiple degree-of-freedom motions. This paper proposes the atmospheric pressure plasma processing (APPP) technique to fabricate an optical sinusoidal grid surface. The characteristics of removal function and surface generation mechanism are firstly presented. Both simulation and experiment validate the effectiveness of APPP to fabricate a sinusoidal grid surface with nanometric precision. Post mechanical polishing experiments show that APPP features can be well maintained while the surface roughness is greatly reduced to meet the optical requirement.

摘要

采用具有纳米精度的正弦光栅作为表面编码器来测量多自由度运动。本文提出了大气压等离子体处理（APPP）技术来制造光学正弦光栅表面。首先介绍了去除函数的特性和表面生成机理。仿真和实验均验证了APPP制造具有纳米精度的正弦光栅表面的有效性。后续的机械抛光实验表明，在大幅降低表面粗糙度以满足光学要求的同时，APPP的特性能够得到很好的保持。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/6dbbcf1ea9e9/micromachines-10-00828-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d667e222a422/micromachines-10-00828-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d57c5dd4a264/micromachines-10-00828-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/2d68d6d56a18/micromachines-10-00828-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/4dae84443e80/micromachines-10-00828-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/5cfbc1910dbc/micromachines-10-00828-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d86144dccb9f/micromachines-10-00828-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/87e1617f7ba2/micromachines-10-00828-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/6d694fdff11a/micromachines-10-00828-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/deb1d064321a/micromachines-10-00828-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/833f84783103/micromachines-10-00828-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/276655abbfb1/micromachines-10-00828-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/ae6f159fe021/micromachines-10-00828-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/6dbbcf1ea9e9/micromachines-10-00828-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d667e222a422/micromachines-10-00828-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d57c5dd4a264/micromachines-10-00828-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/2d68d6d56a18/micromachines-10-00828-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/4dae84443e80/micromachines-10-00828-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/5cfbc1910dbc/micromachines-10-00828-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/d86144dccb9f/micromachines-10-00828-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/87e1617f7ba2/micromachines-10-00828-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/6d694fdff11a/micromachines-10-00828-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/deb1d064321a/micromachines-10-00828-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/833f84783103/micromachines-10-00828-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/276655abbfb1/micromachines-10-00828-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/ae6f159fe021/micromachines-10-00828-g012.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0693/6953015/6dbbcf1ea9e9/micromachines-10-00828-g013.jpg

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本文引用的文献

1
Continuous Phase Plate Structuring by Multi-Aperture Atmospheric Pressure Plasma Processing.通过多孔径大气压等离子体处理实现连续相位板结构化
Micromachines (Basel). 2019 Apr 18;10(4):260. doi: 10.3390/mi10040260.
2
Kinematics Error Compensation for a Surface Measurement Probe on an Ultra-Precision Turning Machine.超精密车床表面测量探头的运动学误差补偿
Micromachines (Basel). 2018 Jul 2;9(7):334. doi: 10.3390/mi9070334.
3
Removal characteristics of plasma chemical vaporization machining with a pipe electrode for optical fabrication.
用于光学制造的管道电极等离子体化学气相加工的去除特性
Appl Opt. 2010 Aug 10;49(23):4434-40. doi: 10.1364/AO.49.004434.
4
Dwell time algorithm in ion beam figuring.离子束加工中的驻留时间算法
Appl Opt. 2009 Jul 10;48(20):3930-7. doi: 10.1364/ao.48.003930.