Department of Electronic Engineering, Sogang University, Seoul 04107, Korea.
J Nanosci Nanotechnol. 2019 Oct 1;19(10):6663-6667. doi: 10.1166/jnn.2019.17094.
We propose a wide dynamic range capacitive force sensor with two wrinkle-structured elastomer layers as a dielectric layer. The sensor consists of electrodes on each substrate and two dielectric layers between them. The electrode is made of platinum and fabricated by using a lift-off process. The polyimide film is used as a substrate. Two wrinkle-structured dielectric layers, which are placed in perpendicular direction, are made by poly(dimethylsiloxane) (PDMS) replica molding process. With the pressure applied on the device, dielectric layers deform while decreasing distance between the electrodes and thus increasing the capacitance of the sensor. The orthogonally positioned wrinkled structures make possible to increase the dynamic range of the capacitive cell. The proposed capacitive sensor operates in the pressure range of 1 MPa with the maximum sensitivity of 0.06%/kPa.
我们提出了一种具有两层褶皱结构弹性体作为介电层的宽动态范围电容式力传感器。该传感器由每个基底上的电极和它们之间的两个介电层组成。电极由铂制成，并通过剥离工艺制造。聚酰亚胺薄膜用作基底。两个褶皱结构的介电层，以垂直的方向放置，由聚二甲基硅氧烷（PDMS）复制模压工艺制成。当设备上施加压力时，介电层会变形，同时减小电极之间的距离，从而增加传感器的电容。正交定位的褶皱结构使得电容单元的动态范围能够增加。所提出的电容传感器在 1 MPa 的压力范围内工作，最大灵敏度为 0.06%/kPa。
