Li Jiayi, Chen Shangbi, Zhou Jingyu, Tang Lei, Jiang Chenkai, Zhang Dawei, Sheng Bin
School of Optical Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China.
Shanghai Key Laboratory of Modern Optical Systems, Engineering Research Center of Optical Instruments and Systems, Shanghai 200093, China.
Polymers (Basel). 2023 Aug 3;15(15):3292. doi: 10.3390/polym15153292.
The significant potential of flexible sensors in various fields such as human health, soft robotics, human-machine interaction, and electronic skin has garnered considerable attention. Capacitive pressure sensor is popular given their mechanical flexibility, high sensitivity, and signal stability. Enhancing the performance of capacitive sensors can be achieved through the utilization of gradient structures and high dielectric constant media. This study introduced a novel dielectric layer, employing the BaTiO-PDMS material with a gradient micro-cones architecture (GMCA). The capacitive sensor was constructed by incorporating a dielectric layer GMCA, which was fabricated using laser engraved acrylic (PMMA) molds and flexible copper-foil/polyimide-tape electrodes. To examine its functionality, the prepared sensor was subjected to a pressure range of 0-50 KPa. Consequently, this sensor exhibited a remarkable sensitivity of up to 1.69 KPa within the pressure range of 0-50 KPa, while maintaining high pressure-resolution across the entire pressure spectrum. Additionally, the pressure sensor demonstrated a rapid response time of 50 ms, low hysteresis of 0.81%, recovery time of 160 ms, and excellent cycling stability over 1000 cycles. The findings indicated that the GMCA pressure sensor, which utilized a gradient structure and BaTiO-PDMS material, exhibited notable sensitivity and a broad linear pressure range. These results underscore the adaptability and viability of this technology, thereby facilitating enhanced flexibility in pressure sensors and fostering advancements in laser manufacturing and flexible devices for a wider array of potential applications.
柔性传感器在人体健康、软体机器人、人机交互和电子皮肤等各个领域具有巨大潜力，已引起广泛关注。电容式压力传感器因其机械柔韧性、高灵敏度和信号稳定性而备受青睐。通过利用梯度结构和高介电常数介质可以提高电容式传感器的性能。本研究引入了一种新型介电层，采用具有梯度微锥结构（GMCA）的BaTiO-PDMS材料。电容式传感器通过结合介电层GMCA构建而成，该介电层使用激光雕刻的丙烯酸（PMMA）模具和柔性铜箔/聚酰亚胺胶带电极制造。为了检验其功能，对制备的传感器施加0-50 KPa的压力范围。结果，该传感器在0-50 KPa的压力范围内表现出高达1.69 KPa的显著灵敏度，同时在整个压力谱上保持高压力分辨率。此外，压力传感器显示出50 ms的快速响应时间、0.81%的低滞后、160 ms的恢复时间以及超过1000次循环的出色循环稳定性。研究结果表明，采用梯度结构和BaTiO-PDMS材料的GMCA压力传感器具有显著的灵敏度和宽线性压力范围。这些结果强调了该技术的适应性和可行性，从而有助于提高压力传感器的柔韧性，并推动激光制造和柔性器件在更广泛潜在应用中的发展。
