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通过电子束光刻技术制造的用于嵌入含氟聚合物中的长程表面等离子体波导的光栅耦合器。

Grating couplers fabricated by e-beam lithography for long-range surface plasmon waveguides embedded in a fluoropolymer.

作者信息

Hirboodvash Zohreh, Khodami Maryam, Fong Norman R, Lisicka-Skrzek Ewa, Olivieri Anthony, Northfield Howard, Niall Tait R, Berini Pierre

出版信息

Appl Opt. 2019 Apr 10;58(11):2994-3002. doi: 10.1364/AO.58.002994.

Abstract

Long-range surface plasmon polariton waveguides consisting of Au stripes integrated with input and output grating couplers embedded in thick Cytop claddings are proposed and demonstrated experimentally. Under the right conditions, grating couplers enable broadside (top) coupling with good efficiency while producing a low level of background light. The scheme does not require high-quality input and output edge facets, and it simplifies optical alignments. We demonstrate coupling using a cleaved bow-tie fiber and a lensed fiber, and we determine the grating coupling efficiencies in both cases over a broad operating wavelength range. The lensed fiber produces a better overlap with the long-range surface plasmon mode of interest and thus results in a better coupling efficiency with essentially no background light as observed on an infrared camera. The measurements are compared with theoretical results obtained using a realistic model of the structures, including out-of-plane curvature in the grating profile resulting from our fabrication process. The coupling scheme along with the surface plasmon waveguides hold strong potential for biosensing applications.

摘要

提出并通过实验证明了一种长程表面等离激元极化子波导,它由集成了输入和输出光栅耦合器的金条纹组成,这些光栅耦合器嵌入在厚的 Cytop 包层中。在适当条件下,光栅耦合器能够以良好的效率实现宽边(顶部)耦合,同时产生低水平的背景光。该方案不需要高质量的输入和输出边缘面,并且简化了光学对准。我们展示了使用劈裂的蝴蝶结光纤和透镜光纤进行的耦合,并在很宽的工作波长范围内确定了两种情况下的光栅耦合效率。透镜光纤与感兴趣的长程表面等离激元模式有更好的重叠,因此在红外相机上观察到基本上没有背景光的情况下,耦合效率更高。将测量结果与使用结构的实际模型获得的理论结果进行了比较,该模型包括我们制造过程中光栅轮廓中的面外曲率。这种耦合方案以及表面等离激元波导在生物传感应用中具有很大的潜力。

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