Mao Shan, Zhao Jianlin
Appl Opt. 2019 Mar 20;58(9):2422-2428. doi: 10.1364/AO.58.002422.
The decenter error can determine the polychromatic integral diffraction efficiency (PIDE) over a broad wave band of hybrid optical systems and further the imaging quality. The mathematical model of the relationship between the decenter error and the PIDE of multilayer diffractive optical elements (MLDOEs) is presented, and the expressions are derived based on phase delay of diffractive optical elements for both normal and oblique incident situations. Finally, the sensitivity of PIDE to the decenter error for MLDOEs used in a long-infrared wave band with a material combination of ZNS-ZNSE is analyzed, and then the decenter error tolerance is proposed to ensure high PIDE over a broad wave band as well as diffraction efficiency at the designed wavelengths. The analysis methods and results could be useful for guiding the decenter error of MLDOEs in hybrid optical systems for optical engineers.
偏心误差能够确定混合光学系统在宽波段上的多色积分衍射效率（PIDE），进而确定成像质量。本文给出了多层衍射光学元件（MLDOEs）的偏心误差与PIDE之间关系的数学模型，并基于衍射光学元件在正入射和斜入射情况下的相位延迟推导出了表达式。最后，分析了采用ZNS-ZNSE材料组合的长红外波段MLDOEs的PIDE对偏心误差的敏感度，进而提出了偏心误差容限，以确保在宽波段上具有较高的PIDE以及在设计波长处具有衍射效率。这些分析方法和结果有助于指导光学工程师在混合光学系统中对MLDOEs的偏心误差进行控制。
