Yang Liangliang, Liu Chenglin, Guo Renjia, Zhao Yongbing
Appl Opt. 2020 Jan 10;59(2):508-514. doi: 10.1364/AO.382110.
Oblique incidence is the general working state for multilayer diffractive optical elements (MLDOEs) in an imaging optical system. The polychromatic integral diffraction efficiency (PIDE) is very sensitive to the incident angle. Therefore, it is necessary to analyze the effect of tilt error on diffraction efficiency/PIDE with oblique incidence. The theoretical model of the relationship between the diffraction efficiency and tilt error with oblique incidence is presented, and the effect of tilt error on diffraction efficiency/PIDE is analyzed. The analysis model of comprehensive PIDE for a certain range of incident angles and the tilt error for MLDOEs is established. The simulation results showed that the comprehensive PIDE is sensitive to tilt angle with oblique incidence, and the tolerance of the tilt error angle can be determined by the comprehensive PIDE. The tilt error tolerance is furthermore investigated with decenter error based on the maximum of comprehensive PIDE. The method and results can be used to guide the tolerance formulation of tilt error for MLDOEs in hybrid optical systems.
斜入射是成像光学系统中多层衍射光学元件（MLDOE）的一般工作状态。多色积分衍射效率（PIDE）对入射角非常敏感。因此，有必要分析斜入射时倾斜误差对衍射效率/PIDE的影响。给出了斜入射时衍射效率与倾斜误差关系的理论模型，并分析了倾斜误差对衍射效率/PIDE的影响。建立了MLDOE在一定入射角范围内的综合PIDE和倾斜误差分析模型。仿真结果表明，斜入射时综合PIDE对倾斜角敏感，倾斜误差角的容差可由综合PIDE确定。基于综合PIDE的最大值，进一步研究了偏心误差下的倾斜误差容差。该方法和结果可用于指导混合光学系统中MLDOE倾斜误差容差的制定。
