Guo Renhui, Liao Zhishan, Li Jianxin, Li Aobo, Song Pingping, Zhu Rihong
Opt Express. 2019 Apr 29;27(9):13072-13082. doi: 10.1364/OE.27.013072.
Wavelength-tuning interferometry is commonly employed to measure the optical homogeneity of parallel plates. However, the nonlinearity of phase shifts caused by wavelength tuning errors and environmental vibration leads to a spatially uniform error in the calculated phase distribution. Herein, a wavelength-tuning interferometry method based on nonuniform fast Fourier transform (WTI-NUFFT) was developed, which solves the spectral aliasing resulting from the spatially uniform error. The characteristics of the WTI-NUFFT method were estimated through comparison with the FFT method. Both the simulated and experimental results showed that the WTI-NUFFT method can improve the accuracy of the optical homogeneity measurement of parallel plates.
波长调谐干涉测量法通常用于测量平行平板的光学均匀性。然而，由波长调谐误差和环境振动引起的相移非线性会导致计算出的相位分布出现空间均匀误差。在此，开发了一种基于非均匀快速傅里叶变换的波长调谐干涉测量法（WTI-NUFFT），它解决了由空间均匀误差导致的频谱混叠问题。通过与快速傅里叶变换（FFT）方法比较，评估了WTI-NUFFT方法的特性。模拟和实验结果均表明，WTI-NUFFT方法能够提高平行平板光学均匀性测量的精度。
