Beldi Samir, Boussaha Faouzi, Hu Jie, Monfardini Alessandro, Traini Alessandro, Levy-Bertrand Florence, Chaumont Christine, Gonzales Manuel, Firminy Josiane, Reix Florent, Rosticher Michael, Mignot Shan, Piat Michel, Bonifacio Piercarlo
Opt Express. 2019 Apr 29;27(9):13319-13328. doi: 10.1364/OE.27.013319.
We designed, fabricated and characterized parallel-plate capacitor lumped-element kinetic inductance detectors (LEKIDs) to operate at near-infrared and optical wavelengths (0.3 -1 μm). The widely used interdigitated capacitor is replaced by a parallel-plate capacitor which, for a given resonance frequency, has a larger capacitance value within a much smaller space allowing to strongly reduce the size of the pixels. The parallel-plate capacitor LEKID array comprises 10 × 10 pixels. The inductive meander is patterned from stoichiometric 52 nm-thick TiN film (Tc ≈4.6 K). The parallel-plate capacitor is made of a TiN base electrode, AlO dielectric and Nb upper electrode. More than 90 resonances out of 100 within the 0.994-1.278 GHz band were identified. The resonances exhibit internal Q-factors up to ∼370 000 at 72 mK. The array was illuminated using a white light and 890 nm monochromatic near infrared LEDs. The estimated quasiparticle lifetime is τqp≈13 µs.
我们设计、制造并表征了用于近红外和光学波长（0.3 - 1μm）的平行板电容器集总元件动态电感探测器（LEKIDs）。广泛使用的叉指电容器被平行板电容器所取代，对于给定的共振频率，平行板电容器在小得多的空间内具有更大的电容值，从而能够大幅减小像素尺寸。平行板电容器LEKID阵列由10×10个像素组成。电感曲折线由化学计量比的52nm厚TiN薄膜（Tc≈4.6K）制成。平行板电容器由TiN基电极、AlO电介质和Nb上电极组成。在0.994 - 1.278GHz频段内的100个共振中识别出了90多个共振。这些共振在72mK时展现出高达约370000的内部品质因数。该阵列使用白光和890nm单色近红外发光二极管进行照明。估计的准粒子寿命为τqp≈13μs。
