Wireless actuation of micromechanical resonators.

The wireless transfer of power is of fundamental and technical interest, with applications ranging from the remote operation of consumer electronics and implanted biomedical devices and sensors to the actuation of devices for which hard-wired power sources are neither desirable nor practical. In particular, biomedical devices that are implanted in the body or brain require small-footprint power receiving elements for wireless charging, which can be accomplished by micromechanical resonators. Moreover, for fundamental experiments, the ultralow-power wireless operation of micromechanical resonators in the microwave range can enable the performance of low-temperature studies of mechanical systems in the quantum regime, where the heat carried by the electrical wires in standard actuation techniques is detrimental to maintaining the resonator in a quantum state. Here we demonstrate the successful actuation of micron-sized silicon-based piezoelectric resonators with resonance frequencies ranging from 36 to 120 MHz at power levels of nanowatts and distances of ~3 feet, including comprehensive polarization, distance and power dependence measurements. Our unprecedented demonstration of the wireless actuation of micromechanical resonators via electric-field coupling down to nanowatt levels may enable a multitude of applications that require the wireless control of sensors and actuators based on micromechanical resonators, which was inaccessible until now.