Omnics Research Group, Department of Mathematics and Physics "Ennio De Giorgi", Institute of Nanotechnology CNR-Nanotec, INFN Sezione di Lecce, University of Salento, Via per Monteroni, 73100 Lecce, Italy.
System Research and Applications, Silicon Biotech, Lecce Lab, STMicroelectronics S.r.l., c/o Ecotekne, Via per Monteroni 165, 73100 Lecce, Italy.
Sensors (Basel). 2023 Jan 26;23(3):1382. doi: 10.3390/s23031382.
A novel approach for dynamic microwave modulation is proposed in the form of reconfigurable resonant circuits. This result is obtained through the monolithic integration of double split ring resonators (DSRRs) with microelectromechanical actuators (MEMS) for geometrical tuning. Two configurations were analyzed to achieve a controlled deformation of the DSRRs' metamaterial geometry by mutual rotation or extrusion along the azimuthal direction of the two constituent rings. Then, the transfer function was numerically simulated for a reconfigurable MEMS-DSRR hybrid architecture where the DSRR is embedded onto a realistic piezo actuator chip. In this case, a 370 MHz resonance frequency shift was obtained under of a 170 µm extrusion driven by a DC voltage. These characteristics in combination with a high Q factor and dimensions compatible with standard CMOS manufacturing techniques provide a step forward for the production of devices with applications in multiband telecommunications and wireless power transfer and in the IoT field.
提出了一种通过集成双分裂环谐振器（DSRR）与微机电系统（MEMS）进行几何调谐的可重构谐振电路来实现动态微波调制的新方法。通过两个构成环的共面旋转或挤压来实现对 DSRR 超材料几何形状的受控变形，分析了两种配置。然后，对嵌入到实际压电致动器芯片上的可重构 MEMS-DSRR 混合结构进行了数值模拟，得到了在直流电压驱动下 170 µm 挤压时的 370 MHz 谐振频率偏移。这些特性与高 Q 因子和与标准 CMOS 制造技术兼容的尺寸相结合，为多波段电信、无线功率传输和物联网领域应用的器件的生产提供了一个新的进展。
