He Liang, Hong Tianjiao, Huang Yue, Xiong Biao, Hong Xufeng, Tahir Muhammad, Haider Waqas Ali, Han Yulai
State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China.
School of New Materials and New Energies, Shenzhen Technology University, Shenzhen 518118, China.
Micromachines (Basel). 2019 May 7;10(5):307. doi: 10.3390/mi10050307.
In this research, the enhancement in electrochemical performance of pyrolyzed carbon microelectrodes by surface modification is investigated. For the proposed microfabrication process, pyrolyzed carbon microelectrodes with multi-walled carbon nanotubes (MWCNTs) on their surface are obtained by developing GM-1060 photoresist in mixture of propylene glycol methyl ether acetate (PGMEA) and CNTs, and following pyrolysis of a micropatterned photoresist. Polyvinyl alcohol (PVA)/HSO electrolyte (1 M) was applied to assemble this carbon/CNT microelectrode-based all-solid-state microsupercapacitor (carbon/CNT-MSC). The carbon/CNT-MSC shows a higher electrochemical performance compared with that of pyrolyzed carbon microelectrode-based MSC (carbon-MSC). The specific areal and volumetric capacitances of carbon/CNT-MSC (4.80 mF/cm and 32.0 F/cm) are higher than those of carbon-MSC (3.52 mF/cm and 23.4 F/cm) at the scan rate of 10 mV/s. In addition, higher energy density and power density of carbon/CNT-MSC (2.85 mWh/cm and 1.98 W/cm) than those of carbon-MSC (2.08 mWh/cm and 1.41 W/cm) were also achieved. This facile surface modification and optimization are potentially promising, being highly compatible with modern microfabrication technologies and allowing integration of highly electrically conductive CNTs into pyrolyzed carbon to assemble MSCs with improved electrochemical performance. Moreover, this method can be potentially applied to other high-performance micro/nanostructures and microdevices/systems.
在本研究中，对通过表面改性提高热解碳微电极的电化学性能进行了研究。对于所提出的微制造工艺，通过在丙二醇甲醚醋酸酯（PGMEA）和碳纳米管（CNT）的混合物中显影GM - 1060光刻胶，并对微图案化光刻胶进行热解，获得表面带有多壁碳纳米管（MWCNT）的热解碳微电极。应用聚乙烯醇（PVA）/硫酸电解液（1 M）来组装这种基于碳/碳纳米管微电极的全固态微型超级电容器（碳/碳纳米管 - MSC）。与基于热解碳微电极的MSC（碳 - MSC）相比，碳/碳纳米管 - MSC表现出更高的电化学性能。在10 mV/s的扫描速率下，碳/碳纳米管 - MSC的比面积电容和体积电容（4.80 mF/cm²和32.0 F/cm³）高于碳 - MSC（3.52 mF/cm²和23.4 F/cm³）。此外，碳/碳纳米管 - MSC的能量密度和功率密度（2.85 mWh/cm²和1.98 W/cm²）也高于碳 - MSC（2.08 mWh/cm²和1.41 W/cm²）。这种简便的表面改性和优化具有潜在的前景，与现代微制造技术高度兼容，并允许将高导电性的碳纳米管集成到热解碳中以组装具有改进电化学性能的MSC。此外，该方法还可潜在地应用于其他高性能的微/纳米结构以及微器件/系统。
