Liu Xue-Qing, Yang Shuang-Ning, Sun Yun-Lu, Yu Lei, Bai Ben-Feng, Chen Qi-Dai, Sun Hong-Bo
Opt Lett. 2019 May 15;44(10):2454-2457. doi: 10.1364/OL.44.002454.
A dry-etching-assisted femtosecond laser lithography technology is proposed to in-site fabricate micro-optical components with an ultra-smooth three-dimensional continuous profile on a non-planar substrate. Owing to the nanometric resolution of femtosecond laser multi-photon polymerization and dry etching, smooth micro-optical components can be realized on hard materials with surface roughness of approximately 1.5 nm. With flexible and arbitrary designability of femtosecond laser lithography, various high-quality micro-optical components are realized on sapphire. These results indicate that dry-etching-assisted femtosecond laser lithography has promising potential for versatile fabrication of arbitrary ultra-smooth micro/nanostructures on hard materials.
提出了一种干法刻蚀辅助飞秒激光光刻技术，用于在非平面衬底上原位制造具有超光滑三维连续轮廓的微光学元件。由于飞秒激光多光子聚合和干法刻蚀的纳米级分辨率，可在表面粗糙度约为1.5纳米的硬质材料上实现光滑的微光学元件。凭借飞秒激光光刻灵活且任意的可设计性，在蓝宝石上实现了各种高质量的微光学元件。这些结果表明，干法刻蚀辅助飞秒激光光刻在硬质材料上通用制造任意超光滑微纳结构方面具有广阔的应用潜力。
