Yang Shuang-Ning, Liu Xue-Qing, Zheng Jia-Xin, Lu Yi-Ming, Gao Bing-Rong
State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, China.
Nanomaterials (Basel). 2020 Jul 4;10(7):1313. doi: 10.3390/nano10071313.
Periodic nanostructures have wide applications in micro-optics, bionics, and optoelectronics. Here, a laser interference with subsequent etching technology is proposed to fabricate uniform periodic nanostructures with controllable morphologies and smooth surfaces on hard materials. One-dimensional microgratings with controllable periods (1, 2, and 3 μm) and heights, from dozens to hundreds of nanometers, and high surface smoothness are realized on GaAs by the method. The surface roughness of the periodic microstructures is significantly reduced from 120 nm to 40 nm with a subsequent inductively coupled plasma (ICP) etching. By using laser interference with angle-multiplexed exposures, two-dimensional square- and hexagonal-patterned microstructures are realized on the surface of GaAs. Compared with samples without etching, the diffraction efficiency can be significantly enhanced for samples with dry etching, due to the improvement of surface quality.
周期性纳米结构在微光学、仿生学和光电子学等领域有着广泛的应用。在此，提出了一种结合激光干涉和后续蚀刻技术的方法，用于在硬质材料上制备具有可控形貌和光滑表面的均匀周期性纳米结构。通过该方法在砷化镓上实现了周期（1、2和3μm）和高度可控（从几十纳米到几百纳米）且表面光滑度高的一维微光栅。经过后续的电感耦合等离子体（ICP）蚀刻，周期性微结构的表面粗糙度从120nm显著降低至40nm。通过采用角度复用曝光的激光干涉技术，在砷化镓表面实现了二维方形和六边形图案的微结构。与未蚀刻的样品相比，经过干法蚀刻的样品由于表面质量的提高，其衍射效率可显著增强。
