Chu Liangyong, Bus Marcel, Korobko Alexander V, Besseling Nicolaas A M
Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands; Surface Technology and Tribology, Department of Mechanics of Solids, Surfaces and Systems (MS3), University of Twente, Drienerlolaan 5, Enschede 7522 NB, the Netherlands.
Organic Materials and Interfaces, Department of Chemical Engineering, Delft University of Technology, van der Maasweg 9, Delft 2629 HZ, the Netherlands.
Ultramicroscopy. 2019 Oct;205:1-4. doi: 10.1016/j.ultramic.2019.05.012. Epub 2019 May 25.
We calibrate the lateral mode AFM (LFM) by determining the position-sensitive photodetector (PSPD) signal dependency on the lateral tip displacement, which is analogous to the constant-compliance region in normal-force calibration. By stick-slip on stiff, amorphous surfaces (silica or glass), the lateral tip displacement is determined accurately using the feedback loop control of AFM system. The sufficiently high contact stiffness between the Si AFM tip and stiff, amorphous surfaces substantially reduces the error of PSPD signal dependency on the lateral tip displacement. No damage or modification of the AFM probe is involved and only a clean silicon or glass wafer is needed.
我们通过确定位置敏感光电探测器（PSPD）信号对横向针尖位移的依赖性来校准横向模式原子力显微镜（LFM），这类似于法向力校准中的恒柔度区域。通过在坚硬的非晶表面（二氧化硅或玻璃）上进行粘滑，利用原子力显微镜系统的反馈回路控制精确确定横向针尖位移。硅原子力显微镜针尖与坚硬的非晶表面之间足够高的接触刚度大大降低了PSPD信号对横向针尖位移依赖性的误差。不涉及原子力显微镜探针的损坏或改性，仅需要一片干净的硅片或玻璃片。
