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基于反馈的原子力显微镜中几何和机械串扰以及针尖-样品粘连导致的成像伪像的同步校正

Feedback based simultaneous correction of imaging artifacts due to geometrical and mechanical cross-talk and tip-sample stick in atomic force microscopy.

作者信息

Shegaonkar Ajit C, Salapaka Srinivasa M

机构信息

Department of Industrial and Enterprise Systems Engineering, University of Illinois at Urbana-Champaign, 104 S. Mathews Ave., Urbana, Illinois 61801, USA.

出版信息

Rev Sci Instrum. 2007 Oct;78(10):103706. doi: 10.1063/1.2800783.

Abstract

This paper presents a feedback scheme that simultaneously corrects, in real time, for the imaging artifacts caused by cantilever and photosensor misalignments as well as misinterpretations in relative lateral position of the tip with respect to the sample due to the tip-sample stick in atomic force microscopy (AFM). The optical beam bounce method, typically used in AFM for imaging, is sensitive to inaccuracies of cantilever geometry and the relative misalignment of the laser source, cantilever, and the laser sensitive diode from the intended design. These inaccuracies, which contribute to the geometrical cross-talk between the normal and the lateral signals, become prominent at the atomic and subnanometer scales, and thereby impede high resolution imaging studies. The feedback scheme accounts for these artifacts and makes imaging insensitive to, in fact, practically independent of these inaccuracies. This scheme counteracts the lateral twisting dynamics of the cantilever, and as a result, it avoids the misinterpretation problem of the relative lateral position of the cantilever tip from the sample and thereby avoids the corresponding imaging artifacts that are typically prominent in contact mode friction force microscopy (FFM). The feedback scheme consists of simultaneously regulating the normal as well as the lateral cantilever deflection signal at their respective set points. This not only removes the imaging artifacts due to geometrical misalignments, mechanical cross-talk, and irregular sliding but also the corresponding compensatory control signal gives a more accurate real time measure of the lateral interaction force between the sample and the cantilever as compared to the lateral deflection signal used in FFM. Experimental results show significant improvement, and in some cases, practical elimination of the artifacts. The design and implementation of a split piezoassembly needed for the lateral actuation for the feedback scheme are also presented.

摘要

本文提出了一种反馈方案,该方案能够实时同时校正原子力显微镜(AFM)中由于悬臂和光电传感器未对准以及由于针尖 - 样品粘连导致的针尖相对于样品横向位置的误判所引起的成像伪影。通常在AFM成像中使用的光束反射法,对悬臂几何形状的不准确以及激光源、悬臂和激光敏感二极管相对于预期设计的相对未对准很敏感。这些不准确因素会导致法向和横向信号之间的几何串扰,在原子和亚纳米尺度上变得很突出,从而阻碍高分辨率成像研究。该反馈方案考虑了这些伪影,使成像对这些不准确因素实际上不敏感,几乎不受其影响。该方案抵消了悬臂的横向扭转动力学,因此避免了悬臂尖端相对于样品横向位置的误判问题,从而避免了在接触模式摩擦力显微镜(FFM)中通常很突出的相应成像伪影。该反馈方案包括同时将法向和横向悬臂偏转信号调节到各自的设定点。这不仅消除了由于几何未对准、机械串扰和不规则滑动引起的成像伪影,而且与FFM中使用的横向偏转信号相比,相应的补偿控制信号给出了样品与悬臂之间横向相互作用力更准确的实时测量值。实验结果显示有显著改善,在某些情况下,实际上消除了伪影。还介绍了反馈方案横向驱动所需的分体压电组件的设计与实现。

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