Liu Lu, Wu Sen, Pang Hai, Hu Xiaodong, Hu Xiaotang
State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China.
School of Science, Tianjin University, Tianjin 300072, China.
Rev Sci Instrum. 2019 Jun;90(6):063707. doi: 10.1063/1.5089534.
A high-speed atomic force microscope (HS-AFM) based on a tip-sample combined scanning architecture is presented. In this system, the X-scanner, which is separated from the AFM head, carries the sample and scans along the fast-axis. The Y and Z scanners integrated in the AFM head oscillate an ultrashort cantilever probe and scan in the other two dimensions. The optical beam deflection method is improved to enable the laser to track the probe over a wide scan range. A novel probe holder realizes easy exchange and alignment of the probe. Due to the separation of the X and Y scanners, both appear with better dynamic performance and carrying capacity. Experiments show that the HS-AFM established in this work can achieve a line rate of up to 100 Hz with the basic proportional-integral-derivative control algorithm and linear driving. The permissible sample size and mass can be as large as several centimeters and above 40 g.
介绍了一种基于针尖-样品组合扫描架构的高速原子力显微镜（HS-AFM）。在该系统中，与原子力显微镜头部分离的X扫描器承载样品并沿快轴扫描。集成在原子力显微镜头部的Y和Z扫描器使超短悬臂探针振荡并在另外两个维度上扫描。改进了光束偏转方法，使激光能够在宽扫描范围内跟踪探针。一种新型探针架实现了探针的轻松更换和对准。由于X和Y扫描器的分离，两者都具有更好的动态性能和承载能力。实验表明，这项工作中建立的HS-AFM使用基本的比例-积分-微分控制算法和线性驱动可实现高达100 Hz的线速率。允许的样品尺寸和质量可高达几厘米和40克以上。
