College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou 310018, China.
State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China.
Sensors (Basel). 2021 Sep 13;21(18):6139. doi: 10.3390/s21186139.
A combined tip-sample scanning architecture can improve the imaging speed of atomic force microscopy (AFM). However, the nonorthogonality between the three scanners and the nonideal response of each scanner cause measurement errors. In this article, the authors systematically analyze the influence of the installation and response errors of the combined scanning architecture. The experimental results show that when the probe in the homemade high-speed AFM moves with the Z-scanner, the spot position on the four-quadrant detector changes, thus introducing measurement error. Comparing the experimental results with the numerical and theoretical results shows that the undesired motion of the Z-scanner introduces a large error. The authors believe that this significant error occurs because the piezoelectric actuator not only stretches along the polarization direction but also swings under nonuniform multifield coupling. This article proposes a direction for further optimizing the instrument and provides design ideas for similar high-speed atomic force microscopes.
组合式针尖-样品扫描架构可以提高原子力显微镜（AFM）的成像速度。然而，三个扫描器之间的非正交性和每个扫描器的非理想响应会导致测量误差。在本文中，作者系统地分析了组合扫描架构的安装和响应误差的影响。实验结果表明，当自制高速 AFM 中的探针随 Z 扫描器移动时，四象限探测器上的光斑位置会发生变化，从而引入测量误差。将实验结果与数值和理论结果进行比较表明，Z 扫描器的非预期运动引入了较大的误差。作者认为，这种显著的误差是由于压电致动器不仅沿极化方向伸缩，而且在非均匀多场耦合下摆动所致。本文为进一步优化仪器提出了方向，并为类似的高速原子力显微镜提供了设计思路。
