Liu Hongpeng, Wang Baohua, Wang Rui, Wang Mingchang, Yu Dan, Wang Weibo
Opt Lett. 2019 Jul 15;44(14):3554-3557. doi: 10.1364/OL.44.003554.
A spectral confocal displacement and morphology measurement device with a photopolymer-based coaxial holographic lens as a high dispersion element is developed. The linear dependence of the axial spatial position on the peak wavelength of dispersion spectrum provides a high accuracy and large range for measuring displacement and morphology. In the linear dispersion region, accompanied with a 120 nm shift of peak wavelength, the measure position range exceeds 20 mm. The available experimental accuracy of displacement and morphology can reach 47.5 μm/0.5 nm using a commercial optical fiber spectrum with a resolution of 0.5 nm. Utilizing thin polymer-based holographic lens with high dispersion can effectively compact the device size. Simultaneously, it can provide a large axial dispersion for measuring the spatial position characterization compared with the traditional glass-based dispersion lens group. A holographic optical lens based on a photopolymer is expected to apply in high-precision surface morphology measurement of large-scale macroscopic objects. It will improve the measurement accuracy and accelerate the development of holographic optical elements.
开发了一种以光聚合物基同轴全息透镜作为高色散元件的光谱共焦位移和形态测量装置。轴向空间位置与色散光谱峰值波长的线性关系为位移和形态测量提供了高精度和大范围。在线性色散区域，伴随峰值波长120nm的偏移，测量位置范围超过20mm。使用分辨率为0.5nm的商用光纤光谱，位移和形态的可用实验精度可达47.5μm/0.5nm。利用具有高色散的薄聚合物基全息透镜可有效减小装置尺寸。同时，与传统玻璃基色散透镜组相比，它可为测量空间位置特征提供大的轴向色散。基于光聚合物的全息光学透镜有望应用于大规模宏观物体的高精度表面形态测量。它将提高测量精度并加速全息光学元件的发展。
