Li Jingwen, Ma Rui, Bai Jiao
Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China.
Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Micromachines (Basel). 2024 Sep 30;15(10):1224. doi: 10.3390/mi15101224.
Chromatic confocal technology is widely used for precise, steady, and efficient displacement measurement in many industrial fields. It employs the confocal and dispersion principles to encode axial positions with the wavelengths of the reflected broad spectrum. The typical chromatic confocal sensor includes a light source, a dispersion objective, conjugate pinholes, and a spectral detection device. This study offers an overview of the current research on chromatic confocal technology. Because of its good performance in displacement detection, chromatic confocal technology has been widely used in contour measurement, biomedical imaging, and thickness measurements, as part of global and professional research. Due to its structural flexibility, it is also easily integrated into industrial equipment for in-machine and online profile measurements. It holds significant potential for future applications in industrial manufacturing and scientific research. However, there are also some challenges to be explored in terms of the broadband light source, dispersive optics design, and the balance between speed and accuracy in signal processing.
色差共焦技术在许多工业领域中广泛用于精确、稳定且高效的位移测量。它利用共焦和色散原理，通过反射宽光谱的波长对轴向位置进行编码。典型的色差共焦传感器包括光源、色散物镜、共轭针孔和光谱检测装置。本研究概述了当前关于色差共焦技术的研究。由于其在位移检测方面的良好性能，色差共焦技术作为整体和专业研究的一部分，已广泛应用于轮廓测量、生物医学成像和厚度测量。由于其结构灵活性，它也易于集成到工业设备中进行机内和在线轮廓测量。它在工业制造和科学研究的未来应用中具有巨大潜力。然而，在宽带光源、色散光学设计以及信号处理中的速度与精度平衡方面，也存在一些有待探索的挑战。
