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具有大测量范围的紧凑型彩色共焦透镜。

Compact Chromatic Confocal Lens with Large Measurement Range.

作者信息

He Ning, Hu Huiqin, Cui Zhiying, Xu Xinjun, Zhou Dakai, Chen Yunbo, Gong Puyin, Chen Youhua, Kuang Cuifang

机构信息

Ningbo Research Institute, Zhejiang University, Ningbo 315100, China.

College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China.

出版信息

Sensors (Basel). 2024 Aug 7;24(16):5122. doi: 10.3390/s24165122.

DOI:10.3390/s24165122
PMID:39204819
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11359950/
Abstract

Spectral confocal sensors are effective for measuring displacements. The core of the spectral confocal measurement system is a dispersive objective lens that uses optical dispersion to establish a one-to-one correspondence between the focusing position and wavelength, achieving high-resolution measurements in the longitudinal direction. Despite significant progress in dispersive objective lenses for spectral confocal sensor systems, challenges such as a limited dispersion range, high cost, and insufficient measurement accuracy persist. To expand the measurement range and improve the accuracy of the spectral confocal sensor, we designed a compact, long-axial dispersion objective lens. This lens has a simple structure that requires only six lens elements, two of which form cemented doublets. The system length is 58 mm, with a working distance of 46 ± 6 mm and a dispersion range of 12 mm within the wavelength range of 450-656 nm. The lens has an object-side numerical aperture (NA) of 0.22 and an image-side NA between 0.198 and 0.24, ensuring high light energy utilization. Finally, a spectral confocal measurement system was constructed based on the designed dispersive objective lens, and performance evaluation tests were conducted. The test results showed that the system achieved a resolution of 0.15 μm and a maximum linear error of ±0.7 μm, demonstrating high-precision measurement capabilities. The proposed lens design enables the development of more portable and cost-effective spectral confocal sensors.

摘要

光谱共焦传感器在测量位移方面很有效。光谱共焦测量系统的核心是一个色散物镜,它利用光学色散在聚焦位置和波长之间建立一一对应关系,从而在纵向方向上实现高分辨率测量。尽管光谱共焦传感器系统的色散物镜取得了显著进展,但诸如色散范围有限、成本高和测量精度不足等挑战仍然存在。为了扩大光谱共焦传感器的测量范围并提高其精度,我们设计了一种紧凑的长轴色散物镜。该透镜结构简单,仅需六个透镜元件,其中两个形成胶合双合透镜。系统长度为58毫米,工作距离为46±6毫米,在450 - 656纳米波长范围内的色散范围为12毫米。该透镜物方数值孔径(NA)为0.22,像方NA在0.198至0.24之间,确保了高光能利用率。最后,基于所设计的色散物镜构建了光谱共焦测量系统,并进行了性能评估测试。测试结果表明,该系统实现了0.15微米的分辨率和±0.7微米的最大线性误差,展示了高精度测量能力。所提出的透镜设计能够开发出更便携、更具成本效益的光谱共焦传感器。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/1a02891abbf6/sensors-24-05122-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/345c0a500d93/sensors-24-05122-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/ec4c77d7a07f/sensors-24-05122-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/050f48bdf56b/sensors-24-05122-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/4edf2f6ebe5a/sensors-24-05122-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/6cc8d287b67c/sensors-24-05122-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/6995819beda9/sensors-24-05122-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/48ca020595fe/sensors-24-05122-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/3dbfadd5d88b/sensors-24-05122-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/09b528d2c821/sensors-24-05122-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/cdf5672b6eeb/sensors-24-05122-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/1a02891abbf6/sensors-24-05122-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/345c0a500d93/sensors-24-05122-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/ec4c77d7a07f/sensors-24-05122-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/050f48bdf56b/sensors-24-05122-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/4edf2f6ebe5a/sensors-24-05122-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/6cc8d287b67c/sensors-24-05122-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/6995819beda9/sensors-24-05122-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/48ca020595fe/sensors-24-05122-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/3dbfadd5d88b/sensors-24-05122-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/09b528d2c821/sensors-24-05122-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/cdf5672b6eeb/sensors-24-05122-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/5332/11359950/1a02891abbf6/sensors-24-05122-g011.jpg

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本文引用的文献

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Opt Express. 2022 Nov 21;30(24):44290-44299. doi: 10.1364/OE.473451.
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Chromatic confocal measurement method using a phase Fresnel zone plate.使用相位菲涅耳波带片的彩色共焦测量方法。
Opt Express. 2022 Jan 17;30(2):2390-2401. doi: 10.1364/OE.449031.
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Chromatic confocal sensor-based sub-aperture scanning and stitching for the measurement of microstructured optical surfaces.基于彩色共焦传感器的子孔径扫描与拼接用于微结构光学表面测量
Opt Express. 2021 Oct 11;29(21):33512-33526. doi: 10.1364/OE.440654.
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Compact scanning confocal chromatic sensor enabling precision 3-D measurements.紧凑型扫描共焦色度传感器实现精确三维测量。
Appl Opt. 2021 Sep 1;60(25):7511-7517. doi: 10.1364/AO.428374.
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Design of a chromatic confocal displacement sensor integrated with an optical laser head.一种集成光学激光头的彩色共焦位移传感器的设计。
Appl Opt. 2020 Oct 10;59(29):9108-9117. doi: 10.1364/AO.403335.
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Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm.具有优化色散探头和改进质心峰值提取算法的彩色共焦位移传感器
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Improved chromatic confocal displacement-sensor based on a spatial-bandpass-filter and an X-shaped fiber-coupler.基于空间带通滤波器和X形光纤耦合器的改进型彩色共焦位移传感器。
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Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor.使用彩色共焦传感器测量平行平板和透镜厚度的方法分析。
Appl Opt. 2010 Jun 10;49(17):3259-64. doi: 10.1364/AO.49.003259.