He Ning, Hu Huiqin, Cui Zhiying, Xu Xinjun, Zhou Dakai, Chen Yunbo, Gong Puyin, Chen Youhua, Kuang Cuifang
Ningbo Research Institute, Zhejiang University, Ningbo 315100, China.
College of Optical Science and Engineering, Zhejiang University, Hangzhou 310058, China.
Sensors (Basel). 2024 Aug 7;24(16):5122. doi: 10.3390/s24165122.
Spectral confocal sensors are effective for measuring displacements. The core of the spectral confocal measurement system is a dispersive objective lens that uses optical dispersion to establish a one-to-one correspondence between the focusing position and wavelength, achieving high-resolution measurements in the longitudinal direction. Despite significant progress in dispersive objective lenses for spectral confocal sensor systems, challenges such as a limited dispersion range, high cost, and insufficient measurement accuracy persist. To expand the measurement range and improve the accuracy of the spectral confocal sensor, we designed a compact, long-axial dispersion objective lens. This lens has a simple structure that requires only six lens elements, two of which form cemented doublets. The system length is 58 mm, with a working distance of 46 ± 6 mm and a dispersion range of 12 mm within the wavelength range of 450-656 nm. The lens has an object-side numerical aperture (NA) of 0.22 and an image-side NA between 0.198 and 0.24, ensuring high light energy utilization. Finally, a spectral confocal measurement system was constructed based on the designed dispersive objective lens, and performance evaluation tests were conducted. The test results showed that the system achieved a resolution of 0.15 μm and a maximum linear error of ±0.7 μm, demonstrating high-precision measurement capabilities. The proposed lens design enables the development of more portable and cost-effective spectral confocal sensors.
光谱共焦传感器在测量位移方面很有效。光谱共焦测量系统的核心是一个色散物镜,它利用光学色散在聚焦位置和波长之间建立一一对应关系,从而在纵向方向上实现高分辨率测量。尽管光谱共焦传感器系统的色散物镜取得了显著进展,但诸如色散范围有限、成本高和测量精度不足等挑战仍然存在。为了扩大光谱共焦传感器的测量范围并提高其精度,我们设计了一种紧凑的长轴色散物镜。该透镜结构简单,仅需六个透镜元件,其中两个形成胶合双合透镜。系统长度为58毫米,工作距离为46±6毫米,在450 - 656纳米波长范围内的色散范围为12毫米。该透镜物方数值孔径(NA)为0.22,像方NA在0.198至0.24之间,确保了高光能利用率。最后,基于所设计的色散物镜构建了光谱共焦测量系统,并进行了性能评估测试。测试结果表明,该系统实现了0.15微米的分辨率和±0.7微米的最大线性误差,展示了高精度测量能力。所提出的透镜设计能够开发出更便携、更具成本效益的光谱共焦传感器。