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基于p型SnO薄膜的高灵敏度热电触觉传感器。

Highly sensitive thermoelectric touch sensor based on p-type SnO thin film.

作者信息

Vieira Eliana M F, Silva J P B, Veltruská Kateřina, Matolín V, Pires A L, Pereira A M, Gomes M J M, Goncalves L M

机构信息

University of Minho, CMEMS-UMINHO, Campus de Azurem, 4804-533 Guimaraes, Portugal.

出版信息

Nanotechnology. 2019 Oct 25;30(43):435502. doi: 10.1088/1361-6528/ab33dd. Epub 2019 Jul 19.

Abstract

Here, the ability of using p-type tin oxide (SnO ) thin films as a thermal sensor has been investigated. Firstly, the thermoelectric performance was optimized by controlling the thickness of the SnO film from 60 up to 160 nm. A high Seebeck coefficient of +263 μV K and electrical conductivity of 4.1 × 10 (S m) were achieved in a 60 nm thick SnO film, due to a compact nanostructured film and the absence of the Sn metallic phase, which was observed for the thicker SnO film leading to a typical thermoelectric transport properties of a n-type Sn film. Moreover, x-ray photoelectron spectroscopy revealed the co-existence of SnO (79.7%) and SnO (20.3%) phases in the 60 nm thick SnO film, while the optical measurements revealed an indirect gap of 1.8 eV and a direct gap of 2.7 eV, respectively. The 60 nm-SnO thin film have been tested as a thermoelectric touch sensor, achieving a V /V  ≈ 20, with a rise time <1 s. Therefore, this work provides an efficient way for developing highly efficient thermal sensors with potential use in display technologies.

摘要

在此,对使用p型氧化锡(SnO )薄膜作为热传感器的能力进行了研究。首先,通过将SnO 薄膜的厚度从60纳米控制到160纳米来优化热电性能。在60纳米厚的SnO 薄膜中,由于薄膜具有致密的纳米结构且不存在Sn金属相,实现了+263 μV K的高塞贝克系数和4.1×10 (S m)的电导率,而较厚的SnO 薄膜呈现出典型的n型Sn薄膜的热电输运特性。此外,X射线光电子能谱显示60纳米厚的SnO 薄膜中存在SnO (79.7%)和SnO (20.3%)相,而光学测量分别揭示了1.8 eV的间接带隙和2.7 eV的直接带隙。60纳米厚的SnO 薄膜已被测试用作热电触摸传感器,实现了V /V ≈ 20,上升时间<1秒。因此,这项工作为开发在显示技术中具有潜在用途的高效热传感器提供了一种有效方法。

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