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用于激光材料加工中适配激光光束轮廓的基模光束整形器的设计与制造方法

Design and Manufacturing Method of Fundamental Beam Mode Shaper for Adapted Laser Beam Profile in Laser Material Processing.

作者信息

Bischoff Christian, Völklein Friedemann, Schmitt Jana, Rädel Ulrich, Umhofer Udo, Jäger Erwin, Lasagni Andrés Fabián

机构信息

Topag Lasertechnik GmbH, Nieder-Ramstädter-Str. 247, 64285 Darmstadt, Germany.

Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany.

出版信息

Materials (Basel). 2019 Jul 13;12(14):2254. doi: 10.3390/ma12142254.

DOI:10.3390/ma12142254
PMID:31337017
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6678773/
Abstract

Many laser material processing applications require an optimized beam profile, e.g., ring shape or Top-Hat profiles with homogeneous intensity distribution. In this study, we show a beam shaping concept leading to a phase shifting element with binary height profile as well as a very low periodicity with near diffraction limited spot size. Further advantages of so-called Fundamental Beam Mode Shaping (FBS) elements are the simplified handling, and a high efficiency and homogeneity. The calculated height profile of FBS elements are transferred in fused silica substrates using a combination of microlithography technologies, reactive ion etching (RIE) and ion beam etching (IBE). The experiments demonstrated a linear relation between the etching depth after RIE and IBE. The optical evaluation of the manufactured FBS beam mode shaper confirmed the presented concept design.

摘要

许多激光材料加工应用都需要优化的光束轮廓，例如具有均匀强度分布的环形或平顶轮廓。在本研究中，我们展示了一种光束整形概念，该概念可导致具有二元高度轮廓的相移元件以及具有接近衍射极限光斑尺寸的极低周期性。所谓的基模光束整形（FBS）元件的进一步优点是操作简便、效率高且均匀性好。使用微光刻技术、反应离子蚀刻（RIE）和离子束蚀刻（IBE）的组合，将计算出的FBS元件高度轮廓转移到熔融石英基板中。实验证明了RIE和IBE之后蚀刻深度之间的线性关系。对制造的FBS光束模式整形器的光学评估证实了所提出的概念设计。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/132a737ab8be/materials-12-02254-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/9ca7d3940ddd/materials-12-02254-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/5a7f33de6496/materials-12-02254-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/a07ed5e54b0d/materials-12-02254-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/b7758513aa4a/materials-12-02254-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/034efea4082e/materials-12-02254-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/fde854c20950/materials-12-02254-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/f2668526e94c/materials-12-02254-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/9fe11d0d7bc5/materials-12-02254-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/132a737ab8be/materials-12-02254-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/9ca7d3940ddd/materials-12-02254-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/5a7f33de6496/materials-12-02254-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/a07ed5e54b0d/materials-12-02254-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/b7758513aa4a/materials-12-02254-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/034efea4082e/materials-12-02254-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/fde854c20950/materials-12-02254-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/f2668526e94c/materials-12-02254-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/9fe11d0d7bc5/materials-12-02254-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/27ec/6678773/132a737ab8be/materials-12-02254-g009.jpg

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本文引用的文献

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