Inaba Masafumi, Ochiai Takumi, Ohara Kazuyoshi, Kato Ryogo, Maki Tasuku, Ohashi Toshiyuki, Kawarada Hiroshi
Graduate School of Advanced Science and Engineering, Waseda University, 3-4-1 Okubo, Shinjuku, Tokyo, 169-8555, Japan.
Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa, Nagoya, 464-8603, Japan.
Small. 2019 Nov;15(48):e1901504. doi: 10.1002/smll.201901504. Epub 2019 Jul 26.
For sp or sp carbon material growth, it is important to investigate the precursors or intermediates just before growth. In this study, the density of ethylene (C H ) outside the plasma discharge space and just before reaching the carbon nanotube (CNT) growth region is investigated by vacuum ultraviolet absorption spectroscopy for plasma discharge in an antenna-type remote plasma chemical vapor deposition with a CH /H system, with which the growth of very long (≈0.5 cm) CNT forests is achieved. Single-wall CNT forests have the potential for application as electrodes in battery cells, vertical wiring for high current applications, and thermal interface materials. It is observed that the plasma discharge decomposes the CH source gas and forms C H species, which reversibly reform to C H in the plasma-off state. In addition, the density of the formed C H has a strong correlation to the CNT growth rate. Therefore, the C H density is a good indicator of the density of C H species for CNT growth in the CH /H plasma system.
对于sp或sp碳材料的生长，研究生长前的前驱体或中间体非常重要。在本研究中，通过真空紫外吸收光谱法，对采用CH₄/H₂系统的天线型远程等离子体化学气相沉积中，等离子体放电空间外部且恰好在到达碳纳米管（CNT）生长区域之前的乙烯（C₂H₄）密度进行了研究，利用该系统可实现非常长（≈0.5厘米）的CNT森林的生长。单壁CNT森林有潜力用作电池单元中的电极、高电流应用的垂直布线以及热界面材料。据观察，等离子体放电分解CH₄源气体并形成C₂H₄物种，这些物种在等离子体关闭状态下可逆地重新形成C₂H₂。此外，所形成的C₂H₄密度与CNT生长速率有很强的相关性。因此，在CH₄/H₂等离子体系统中，C₂H₄密度是用于CNT生长的C₂H₂物种密度的良好指标。
